---
_id: '34214'
abstract:
- lang: eng
  text: This article presents the application and evaluation of a cantilever with
    integrated sensing and actuation as part of an atomic force microscope (AFM) with
    an adjustable probe direction, which is integrated into a nano measuring machine
    (NMM-1). The AFM, which is operated in closed-loop intermittent contact mode,
    is based on two rotational axes that enable the adjustment of the probe direction
    to cover a complete hemisphere. The axes greatly enlarge the metrology frame of
    the measuring system by materials with a comparatively high coefficient of thermal
    expansion, which ultimately limits the achievable measurement uncertainty of the
    measuring system. Thus, to reduce the thermal sensitivity of the system, the redesign
    of the rotational kinematics is mandatory. However, in this article, some preliminary
    investigations on the application of a self-sensing cantilever with an integrated
    micro heater for its stimulation will be presented. In previous investigations,
    a piezoelectric actuator has been applied to stimulate the cantilever. However,
    the removal of the piezoelectric actuator, which is enabled by the application
    of a cantilever with an integrated micro heater, promises an essential simplification
    of the sensor holder. Thus, in the future it might be possible to use materials
    with a low coefficient of thermal expansion, which are often difficult to machine
    and therefore only allow for rather simple geometries. Furthermore, because of
    the creepage of piezoelectric actuators, their removal from the metrology frame
    might lead to improved metrological characteristics. As will be shown, there are
    no significant differences between the two modes of actuation. Therefore, the
    redesigned rotational system will be based on the cantilever with integrated sensing
    and actuation.
author:
- first_name: Janik
  full_name: Schaude, Janik
  last_name: Schaude
- first_name: Tino
  full_name: Hausotte, Tino
  last_name: Hausotte
citation:
  ama: Schaude J, Hausotte T. Atomic Force Microscope with an Adjustable Probe Direction
    and Integrated Sensing and Actuation. <i>Nanomanufacturing and Metrology</i>.
    2022;5(2):139-148. doi:<a href="https://doi.org/10.1007/s41871-022-00143-9">10.1007/s41871-022-00143-9</a>
  apa: Schaude, J., &#38; Hausotte, T. (2022). Atomic Force Microscope with an Adjustable
    Probe Direction and Integrated Sensing and Actuation. <i>Nanomanufacturing and
    Metrology</i>, <i>5</i>(2), 139–148. <a href="https://doi.org/10.1007/s41871-022-00143-9">https://doi.org/10.1007/s41871-022-00143-9</a>
  bibtex: '@article{Schaude_Hausotte_2022, title={Atomic Force Microscope with an
    Adjustable Probe Direction and Integrated Sensing and Actuation}, volume={5},
    DOI={<a href="https://doi.org/10.1007/s41871-022-00143-9">10.1007/s41871-022-00143-9</a>},
    number={2}, journal={Nanomanufacturing and Metrology}, publisher={Springer Science
    and Business Media LLC}, author={Schaude, Janik and Hausotte, Tino}, year={2022},
    pages={139–148} }'
  chicago: 'Schaude, Janik, and Tino Hausotte. “Atomic Force Microscope with an Adjustable
    Probe Direction and Integrated Sensing and Actuation.” <i>Nanomanufacturing and
    Metrology</i> 5, no. 2 (2022): 139–48. <a href="https://doi.org/10.1007/s41871-022-00143-9">https://doi.org/10.1007/s41871-022-00143-9</a>.'
  ieee: 'J. Schaude and T. Hausotte, “Atomic Force Microscope with an Adjustable Probe
    Direction and Integrated Sensing and Actuation,” <i>Nanomanufacturing and Metrology</i>,
    vol. 5, no. 2, pp. 139–148, 2022, doi: <a href="https://doi.org/10.1007/s41871-022-00143-9">10.1007/s41871-022-00143-9</a>.'
  mla: Schaude, Janik, and Tino Hausotte. “Atomic Force Microscope with an Adjustable
    Probe Direction and Integrated Sensing and Actuation.” <i>Nanomanufacturing and
    Metrology</i>, vol. 5, no. 2, Springer Science and Business Media LLC, 2022, pp.
    139–48, doi:<a href="https://doi.org/10.1007/s41871-022-00143-9">10.1007/s41871-022-00143-9</a>.
  short: J. Schaude, T. Hausotte, Nanomanufacturing and Metrology 5 (2022) 139–148.
date_created: 2022-12-05T21:15:09Z
date_updated: 2023-01-02T11:10:08Z
department:
- _id: '630'
doi: 10.1007/s41871-022-00143-9
intvolume: '         5'
issue: '2'
keyword:
- Industrial and Manufacturing Engineering
- Mechanical Engineering
- Materials Science (miscellaneous)
language:
- iso: eng
page: 139-148
project:
- _id: '130'
  grant_number: '418701707'
  name: 'TRR 285: TRR 285'
- _id: '133'
  name: 'TRR 285 - C: TRR 285 - Project Area C'
- _id: '149'
  name: 'TRR 285 – C05: TRR 285 - Subproject C05'
publication: Nanomanufacturing and Metrology
publication_identifier:
  issn:
  - 2520-811X
  - 2520-8128
publication_status: published
publisher: Springer Science and Business Media LLC
status: public
title: Atomic Force Microscope with an Adjustable Probe Direction and Integrated Sensing
  and Actuation
type: journal_article
user_id: '14931'
volume: 5
year: '2022'
...