---
_id: '65270'
abstract:
- lang: eng
  text: 'In perovskite solar cells (PSCs), electron transport layers (ETLs) play an
    important role in the selection and transport of electrons. Understanding the
    properties of these layers in relation to device performance is essential for
    optimizing solar cell efficiency and enabling their integration into emerging
    architectures, such as flexible solar cells. Here, we deposited TiO2 at different
    thicknesses using atomic layer deposition (ALD), a technique well-suited for producing
    uniform and pinhole-free films. The crystal structure of the layers was controlled
    by depositing the films at three different temperatures: 150 °C, 250 °C, and 350
    °C. The layers were characterized in detail to determine the morphology (by atomic
    force microscopy), surface composition (by X-ray photoelectron spectroscopy) and
    the crystal structure (by X-ray diffraction). The TiO2 layers were then incorporated
    as ETLs in planar perovskite solar cells to evaluate their influence on device
    performance. Higher deposition temperatures led to improvements in device fill
    factor and open-circuit voltage, leading to more efficient solar cells. Notably,
    the best device performance for the ALD-TiO2 layers was achieved with films deposited
    at 250 °C.'
article_type: original
author:
- first_name: Syeda
  full_name: Qudsia, Syeda
  last_name: Qudsia
- first_name: Alexander
  full_name: Weiss, Alexander
  last_name: Weiss
- first_name: Saara
  full_name: Sirkiä, Saara
  last_name: Sirkiä
- first_name: Fuzeng
  full_name: Wang, Fuzeng
  last_name: Wang
- first_name: Emil
  full_name: Rosqvist, Emil
  last_name: Rosqvist
- first_name: Teresa De
  full_name: Los Arcos, Teresa De
  last_name: Los Arcos
- first_name: Christian
  full_name: Weinberger, Christian
  last_name: Weinberger
- first_name: Janne
  full_name: Halme, Janne
  last_name: Halme
- first_name: Marianna
  full_name: Kemell, Marianna
  last_name: Kemell
- first_name: Jan-Henrik
  full_name: Smått, Jan-Henrik
  last_name: Smått
citation:
  ama: Qudsia S, Weiss A, Sirkiä S, et al. Influence of deposition temperature and
    thickness of ALD-TiO2 on planar perovskite solar cell performance. <i>Applied
    Surface Science</i>. Published online 2026:166755. doi:<a href="https://doi.org/10.1016/j.apsusc.2026.166755">https://doi.org/10.1016/j.apsusc.2026.166755</a>
  apa: Qudsia, S., Weiss, A., Sirkiä, S., Wang, F., Rosqvist, E., Los Arcos, T. D.,
    Weinberger, C., Halme, J., Kemell, M., &#38; Smått, J.-H. (2026). Influence of
    deposition temperature and thickness of ALD-TiO2 on planar perovskite solar cell
    performance. <i>Applied Surface Science</i>, 166755. <a href="https://doi.org/10.1016/j.apsusc.2026.166755">https://doi.org/10.1016/j.apsusc.2026.166755</a>
  bibtex: '@article{Qudsia_Weiss_Sirkiä_Wang_Rosqvist_Los Arcos_Weinberger_Halme_Kemell_Smått_2026,
    title={Influence of deposition temperature and thickness of ALD-TiO2 on planar
    perovskite solar cell performance}, DOI={<a href="https://doi.org/10.1016/j.apsusc.2026.166755">https://doi.org/10.1016/j.apsusc.2026.166755</a>},
    journal={Applied Surface Science}, author={Qudsia, Syeda and Weiss, Alexander
    and Sirkiä, Saara and Wang, Fuzeng and Rosqvist, Emil and Los Arcos, Teresa De
    and Weinberger, Christian and Halme, Janne and Kemell, Marianna and Smått, Jan-Henrik},
    year={2026}, pages={166755} }'
  chicago: Qudsia, Syeda, Alexander Weiss, Saara Sirkiä, Fuzeng Wang, Emil Rosqvist,
    Teresa De Los Arcos, Christian Weinberger, Janne Halme, Marianna Kemell, and Jan-Henrik
    Smått. “Influence of Deposition Temperature and Thickness of ALD-TiO2 on Planar
    Perovskite Solar Cell Performance.” <i>Applied Surface Science</i>, 2026, 166755.
    <a href="https://doi.org/10.1016/j.apsusc.2026.166755">https://doi.org/10.1016/j.apsusc.2026.166755</a>.
  ieee: 'S. Qudsia <i>et al.</i>, “Influence of deposition temperature and thickness
    of ALD-TiO2 on planar perovskite solar cell performance,” <i>Applied Surface Science</i>,
    p. 166755, 2026, doi: <a href="https://doi.org/10.1016/j.apsusc.2026.166755">https://doi.org/10.1016/j.apsusc.2026.166755</a>.'
  mla: Qudsia, Syeda, et al. “Influence of Deposition Temperature and Thickness of
    ALD-TiO2 on Planar Perovskite Solar Cell Performance.” <i>Applied Surface Science</i>,
    2026, p. 166755, doi:<a href="https://doi.org/10.1016/j.apsusc.2026.166755">https://doi.org/10.1016/j.apsusc.2026.166755</a>.
  short: S. Qudsia, A. Weiss, S. Sirkiä, F. Wang, E. Rosqvist, T.D. Los Arcos, C.
    Weinberger, J. Halme, M. Kemell, J.-H. Smått, Applied Surface Science (2026) 166755.
date_created: 2026-04-01T08:39:55Z
date_updated: 2026-04-01T08:43:03Z
doi: https://doi.org/10.1016/j.apsusc.2026.166755
keyword:
- Titanium dioxide
- Atomic layer deposition
- Electron transport layer
- Perovskite solar cells
language:
- iso: eng
main_file_link:
- open_access: '1'
  url: https://www.sciencedirect.com/science/article/pii/S0169433226009591?via%3Dihub
oa: '1'
page: '166755'
publication: Applied Surface Science
publication_identifier:
  issn:
  - 0169-4332
status: public
title: Influence of deposition temperature and thickness of ALD-TiO2 on planar perovskite
  solar cell performance
type: journal_article
user_id: '11848'
year: '2026'
...