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Hett, T. Frers, A. Widhalm, G. Berth, U. Hilleringmann, and A. Zrenner, “Silicon oxynitride microdisk resonators for integrated waveguide coupling,” in <i>Smart Systems Integration 2016 - International Conference and Exhibition on Integration Issues of Miniaturized Systems, SSI 2016</i>, Munich, 2016, pp. 400–403.","apa":"Hett, T., Frers, T., Widhalm, A., Berth, G., Hilleringmann, U., &#38; Zrenner, A. (2016). Silicon oxynitride microdisk resonators for integrated waveguide coupling. In <i>Smart Systems Integration 2016 - International Conference and Exhibition on Integration Issues of Miniaturized Systems, SSI 2016</i> (pp. 400–403). Munich.","chicago":"Hett, Thomas, Torsten Frers, Alex Widhalm, Gerhard Berth, Ulrich Hilleringmann, and Artur Zrenner. “Silicon Oxynitride Microdisk Resonators for Integrated Waveguide Coupling.” In <i>Smart Systems Integration 2016 - International Conference and Exhibition on Integration Issues of Miniaturized Systems, SSI 2016</i>, 400–403. Munich, 2016.","short":"T. Hett, T. Frers, A. Widhalm, G. Berth, U. Hilleringmann, A. Zrenner, in: Smart Systems Integration 2016 - International Conference and Exhibition on Integration Issues of Miniaturized Systems, SSI 2016, Munich, 2016, pp. 400–403.","mla":"Hett, Thomas, et al. “Silicon Oxynitride Microdisk Resonators for Integrated Waveguide Coupling.” <i>Smart Systems Integration 2016 - International Conference and Exhibition on Integration Issues of Miniaturized Systems, SSI 2016</i>, 2016, pp. 400–03.","bibtex":"@inproceedings{Hett_Frers_Widhalm_Berth_Hilleringmann_Zrenner_2016, place={Munich}, title={Silicon oxynitride microdisk resonators for integrated waveguide coupling}, booktitle={Smart Systems Integration 2016 - International Conference and Exhibition on Integration Issues of Miniaturized Systems, SSI 2016}, author={Hett, Thomas and Frers, Torsten and Widhalm, Alex and Berth, Gerhard and Hilleringmann, Ulrich and Zrenner, Artur}, year={2016}, pages={400–403} }","ama":"Hett T, Frers T, Widhalm A, Berth G, Hilleringmann U, Zrenner A. Silicon oxynitride microdisk resonators for integrated waveguide coupling. In: <i>Smart Systems Integration 2016 - International Conference and Exhibition on Integration Issues of Miniaturized Systems, SSI 2016</i>. Munich; 2016:400-403."}},{"citation":{"ieee":"T. Meyers, F. F. Vidor, K. Brassat, J. Lindner, and U. Hilleringmann, “Low-voltage DNTT-based thin-film transistors and inverters for flexible electronics,” <i>Microelectronic Engineering</i>, vol. 174, pp. 35–39, 2016.","mla":"Meyers, Thorsten, et al. “Low-Voltage DNTT-Based Thin-Film Transistors and Inverters for Flexible Electronics.” <i>Microelectronic Engineering</i>, vol. 174, Elsevier BV, 2016, pp. 35–39, doi:<a href=\"https://doi.org/10.1016/j.mee.2016.12.018\">10.1016/j.mee.2016.12.018</a>.","apa":"Meyers, T., Vidor, F. F., Brassat, K., Lindner, J., &#38; Hilleringmann, U. (2016). Low-voltage DNTT-based thin-film transistors and inverters for flexible electronics. <i>Microelectronic Engineering</i>, <i>174</i>, 35–39. <a href=\"https://doi.org/10.1016/j.mee.2016.12.018\">https://doi.org/10.1016/j.mee.2016.12.018</a>","bibtex":"@article{Meyers_Vidor_Brassat_Lindner_Hilleringmann_2016, title={Low-voltage DNTT-based thin-film transistors and inverters for flexible electronics}, volume={174}, DOI={<a href=\"https://doi.org/10.1016/j.mee.2016.12.018\">10.1016/j.mee.2016.12.018</a>}, journal={Microelectronic Engineering}, publisher={Elsevier BV}, author={Meyers, Thorsten and Vidor, Fábio F. and Brassat, Katharina and Lindner, Jörg and Hilleringmann, Ulrich}, year={2016}, pages={35–39} }","chicago":"Meyers, Thorsten, Fábio F. Vidor, Katharina Brassat, Jörg Lindner, and Ulrich Hilleringmann. “Low-Voltage DNTT-Based Thin-Film Transistors and Inverters for Flexible Electronics.” <i>Microelectronic Engineering</i> 174 (2016): 35–39. <a href=\"https://doi.org/10.1016/j.mee.2016.12.018\">https://doi.org/10.1016/j.mee.2016.12.018</a>.","short":"T. Meyers, F.F. Vidor, K. Brassat, J. Lindner, U. Hilleringmann, Microelectronic Engineering 174 (2016) 35–39.","ama":"Meyers T, Vidor FF, Brassat K, Lindner J, Hilleringmann U. Low-voltage DNTT-based thin-film transistors and inverters for flexible electronics. <i>Microelectronic Engineering</i>. 2016;174:35-39. doi:<a href=\"https://doi.org/10.1016/j.mee.2016.12.018\">10.1016/j.mee.2016.12.018</a>"},"file_date_updated":"2018-08-20T13:35:02Z","has_accepted_license":"1","status":"public","volume":174,"ddc":["530"],"user_id":"55706","publisher":"Elsevier BV","_id":"3956","page":"35-39","abstract":[{"lang":"eng","text":"In this article we present an integration technique for low-voltage DNTT-based TFTs for flexible electronic applications.\r\nTherefore, a high-k nanocomposite combining the flexibility of its polymericmatrix and the high permittivity\r\nof the incorporated inorganic material was used as gate dielectric layer. The influence of a conventional\r\nphotolithography process upon the dielectric layer is analyzed regarding electrical instabilities in the device characteristics.\r\nThe impact of an implemented sacrificial layer to reduce chemical stress to the insulating film during\r\nphotolithography is evaluated. Furthermore, first inverter circuits were integrated and electrically characterized.\r\nAdditionally, the implementation of this sacrificial layer can be used for future complementary circuit design."}],"publication":"Microelectronic Engineering","department":[{"_id":"286"},{"_id":"15"}],"type":"journal_article","date_created":"2018-08-20T13:33:05Z","file":[{"date_created":"2018-08-20T13:35:02Z","creator":"hclaudia","file_id":"3957","success":1,"content_type":"application/pdf","relation":"main_file","date_updated":"2018-08-20T13:35:02Z","file_name":"Now-voltage DNTT-based thin-film transistors and inverters for flexible electronics.pdf","file_size":758984,"access_level":"closed"}],"intvolume":"       174","article_type":"original","date_updated":"2022-01-06T07:00:00Z","publication_status":"published","publication_identifier":{"issn":["0167-9317"]},"author":[{"full_name":"Meyers, Thorsten","last_name":"Meyers","first_name":"Thorsten"},{"full_name":"Vidor, Fábio F.","first_name":"Fábio F.","last_name":"Vidor"},{"id":"11305","full_name":"Brassat, Katharina","first_name":"Katharina","last_name":"Brassat"},{"id":"20797","first_name":"Jörg","last_name":"Lindner","full_name":"Lindner, Jörg"},{"last_name":"Hilleringmann","first_name":"Ulrich","full_name":"Hilleringmann, Ulrich"}],"title":"Low-voltage DNTT-based thin-film transistors and inverters for flexible electronics","year":"2016","doi":"10.1016/j.mee.2016.12.018","language":[{"iso":"eng"}]},{"citation":{"ieee":"E. Ali, C. Hangmann, C. Hedayat, F. Haddad, W. Rahajandraibe, and U. Hilleringmann, “Event Driven Modeling and Characterization of the Second Order Voltage Switched Charge Pump PLL,” <i>IEEE Transactions on Circuits and Systems I: Regular Papers</i>, vol. 63, no. 3, pp. 347–358, 2016, doi: <a href=\"https://doi.org/10.1109/tcsi.2015.2512759\">10.1109/tcsi.2015.2512759</a>.","apa":"Ali, E., Hangmann, C., Hedayat, C., Haddad, F., Rahajandraibe, W., &#38; Hilleringmann, U. (2016). Event Driven Modeling and Characterization of the Second Order Voltage Switched Charge Pump PLL. <i>IEEE Transactions on Circuits and Systems I: Regular Papers</i>, <i>63</i>(3), 347–358. <a href=\"https://doi.org/10.1109/tcsi.2015.2512759\">https://doi.org/10.1109/tcsi.2015.2512759</a>","chicago":"Ali, Ehsan, Christian Hangmann, Christian Hedayat, Fayrouz Haddad, Wenceslas Rahajandraibe, and Ulrich Hilleringmann. “Event Driven Modeling and Characterization of the Second Order Voltage Switched Charge Pump PLL.” <i>IEEE Transactions on Circuits and Systems I: Regular Papers</i> 63, no. 3 (2016): 347–58. <a href=\"https://doi.org/10.1109/tcsi.2015.2512759\">https://doi.org/10.1109/tcsi.2015.2512759</a>.","short":"E. Ali, C. Hangmann, C. Hedayat, F. Haddad, W. Rahajandraibe, U. Hilleringmann, IEEE Transactions on Circuits and Systems I: Regular Papers 63 (2016) 347–358.","mla":"Ali, Ehsan, et al. “Event Driven Modeling and Characterization of the Second Order Voltage Switched Charge Pump PLL.” <i>IEEE Transactions on Circuits and Systems I: Regular Papers</i>, vol. 63, no. 3, Institute of Electrical and Electronics Engineers (IEEE), 2016, pp. 347–58, doi:<a href=\"https://doi.org/10.1109/tcsi.2015.2512759\">10.1109/tcsi.2015.2512759</a>.","bibtex":"@article{Ali_Hangmann_Hedayat_Haddad_Rahajandraibe_Hilleringmann_2016, title={Event Driven Modeling and Characterization of the Second Order Voltage Switched Charge Pump PLL}, volume={63}, DOI={<a href=\"https://doi.org/10.1109/tcsi.2015.2512759\">10.1109/tcsi.2015.2512759</a>}, number={3}, journal={IEEE Transactions on Circuits and Systems I: Regular Papers}, publisher={Institute of Electrical and Electronics Engineers (IEEE)}, author={Ali, Ehsan and Hangmann, Christian and Hedayat, Christian and Haddad, Fayrouz and Rahajandraibe, Wenceslas and Hilleringmann, Ulrich}, year={2016}, pages={347–358} }","ama":"Ali E, Hangmann C, Hedayat C, Haddad F, Rahajandraibe W, Hilleringmann U. Event Driven Modeling and Characterization of the Second Order Voltage Switched Charge Pump PLL. <i>IEEE Transactions on Circuits and Systems I: Regular Papers</i>. 2016;63(3):347-358. doi:<a href=\"https://doi.org/10.1109/tcsi.2015.2512759\">10.1109/tcsi.2015.2512759</a>"},"user_id":"20179","volume":63,"page":"347-358","publisher":"Institute of Electrical and Electronics Engineers (IEEE)","_id":"39469","status":"public","type":"journal_article","keyword":["Electrical and Electronic Engineering"],"department":[{"_id":"59"}],"date_created":"2023-01-24T11:15:51Z","issue":"3","publication":"IEEE Transactions on Circuits and Systems I: Regular Papers","doi":"10.1109/tcsi.2015.2512759","language":[{"iso":"eng"}],"date_updated":"2023-03-21T10:10:36Z","publication_status":"published","intvolume":"        63","year":"2016","title":"Event Driven Modeling and Characterization of the Second Order Voltage Switched Charge Pump PLL","publication_identifier":{"issn":["1549-8328","1558-0806"]},"author":[{"last_name":"Ali","first_name":"Ehsan","full_name":"Ali, Ehsan"},{"full_name":"Hangmann, Christian","last_name":"Hangmann","first_name":"Christian"},{"first_name":"Christian","last_name":"Hedayat","full_name":"Hedayat, Christian"},{"full_name":"Haddad, Fayrouz","first_name":"Fayrouz","last_name":"Haddad"},{"full_name":"Rahajandraibe, Wenceslas","last_name":"Rahajandraibe","first_name":"Wenceslas"},{"full_name":"Hilleringmann, Ulrich","first_name":"Ulrich","last_name":"Hilleringmann","id":"20179"}]},{"date_created":"2023-01-24T11:19:05Z","type":"conference","department":[{"_id":"59"}],"publication":"Micro-Nano-Integration; 6. 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