Systematic investigations of minimum feature sizes and geometrical accuracies
G. Adam, D. Zimmer, in: 2014.
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Adam, Guido;
Zimmer, DetmarLibreCat
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Adam G, Zimmer D. Systematic investigations of minimum feature sizes and geometrical accuracies. In: ; 2014.
Adam, G., & Zimmer, D. (2014). Systematic investigations of minimum feature sizes and geometrical accuracies.
@inproceedings{Adam_Zimmer_2014, title={Systematic investigations of minimum feature sizes and geometrical accuracies}, author={Adam, Guido and Zimmer, Detmar}, year={2014} }
Adam, Guido, and Detmar Zimmer. “Systematic Investigations of Minimum Feature Sizes and Geometrical Accuracies,” 2014.
G. Adam and D. Zimmer, “Systematic investigations of minimum feature sizes and geometrical accuracies,” 2014.
Adam, Guido, and Detmar Zimmer. Systematic Investigations of Minimum Feature Sizes and Geometrical Accuracies. 2014.
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