[{"dc":{"rights":["info:eu-repo/semantics/closedAccess"],"language":["eng"],"type":["info:eu-repo/semantics/article","doc-type:article","text","http://purl.org/coar/resource_type/c_6501"],"identifier":["https://ris.uni-paderborn.de/record/21125"],"date":["2021"],"title":["Ordered arrays of Si nanopillars with alternating diameters fabricated by nanosphere lithography and metal-assisted chemical etching"],"source":["Kismann M, Riedl DT, Lindner PDJK. Ordered arrays of Si nanopillars with alternating diameters fabricated by nanosphere lithography and metal-assisted chemical etching. Materials Science in Semiconductor Processing. 2021."],"creator":["Kismann, Michael","Riedl, Dr. Thomas","Lindner, Prof. Dr. Jörg KN"]},"user_id":"77496","author":[{"first_name":"Michael","last_name":"Kismann"},{"last_name":"Riedl","first_name":"Dr. Thomas"},{"first_name":"Prof. Dr. Jörg KN","last_name":"Lindner"}],"publication":"Materials Science in Semiconductor Processing","department":[{"_id":"286","tree":[{"_id":"169"},{"_id":"15"},{"_id":"35"},{"_id":"44"},{"_id":"43"}]},{"_id":"15","tree":[{"_id":"35"},{"_id":"44"},{"_id":"43"}]},{"_id":"321","tree":[{"_id":"216"},{"_id":"43"}]},{"tree":[{"_id":"44"},{"_id":"43"}],"_id":"9"}],"status":"public","date_created":"2021-02-02T16:41:11Z","dini_type":"doc-type:article","_id":"21125","date_updated":"2022-01-06T06:54:46Z","creator":{"login":"nprante","id":"77496"},"language":[{}],"type":"journal_article","citation":{"ieee":"M. Kismann, D. T. Riedl, and P. D. J. K. Lindner, “Ordered arrays of Si nanopillars with alternating diameters fabricated by nanosphere lithography and metal-assisted chemical etching,” Materials Science in Semiconductor Processing, 2021.","short":"M. Kismann, D.T. Riedl, P.D.J.K. Lindner, Materials Science in Semiconductor Processing (2021).","bibtex":"@article{Kismann_Riedl_Lindner_2021, title={Ordered arrays of Si nanopillars with alternating diameters fabricated by nanosphere lithography and metal-assisted chemical etching}, journal={Materials Science in Semiconductor Processing}, author={Kismann, Michael and Riedl, Dr. Thomas and Lindner, Prof. Dr. Jörg KN}, year={2021} }","mla":"Kismann, Michael, et al. “Ordered Arrays of Si Nanopillars with Alternating Diameters Fabricated by Nanosphere Lithography and Metal-Assisted Chemical Etching.” Materials Science in Semiconductor Processing, 2021.","chicago":"Kismann, Michael, Dr. Thomas Riedl, and Prof. Dr. Jörg KN Lindner. “Ordered Arrays of Si Nanopillars with Alternating Diameters Fabricated by Nanosphere Lithography and Metal-Assisted Chemical Etching.” Materials Science in Semiconductor Processing, 2021.","apa":"Kismann, M., Riedl, D. T., & Lindner, P. D. J. K. (2021). Ordered arrays of Si nanopillars with alternating diameters fabricated by nanosphere lithography and metal-assisted chemical etching. Materials Science in Semiconductor Processing."},"uri_base":"https://ris.uni-paderborn.de"}]