{"language":[{"iso":"eng"}],"publication":"Materials Science in Semiconductor Processing","type":"journal_article","date_updated":"2022-01-06T06:54:46Z","status":"public","year":"2021","author":[{"first_name":"Michael","last_name":"Kismann","full_name":"Kismann, Michael"},{"full_name":"Riedl, Dr. Thomas","last_name":"Riedl","first_name":"Dr. Thomas"},{"first_name":"Prof. Dr. Jörg KN","full_name":"Lindner, Prof. Dr. Jörg KN","last_name":"Lindner"}],"department":[{"_id":"286"},{"_id":"15"},{"_id":"321"},{"_id":"9"}],"title":"Ordered arrays of Si nanopillars with alternating diameters fabricated by nanosphere lithography and metal-assisted chemical etching","_id":"21125","citation":{"bibtex":"@article{Kismann_Riedl_Lindner_2021, title={Ordered arrays of Si nanopillars with alternating diameters fabricated by nanosphere lithography and metal-assisted chemical etching}, journal={Materials Science in Semiconductor Processing}, author={Kismann, Michael and Riedl, Dr. Thomas and Lindner, Prof. Dr. Jörg KN}, year={2021} }","short":"M. Kismann, D.T. Riedl, P.D.J.K. Lindner, Materials Science in Semiconductor Processing (2021).","chicago":"Kismann, Michael, Dr. Thomas Riedl, and Prof. Dr. Jörg KN Lindner. “Ordered Arrays of Si Nanopillars with Alternating Diameters Fabricated by Nanosphere Lithography and Metal-Assisted Chemical Etching.” <i>Materials Science in Semiconductor Processing</i>, 2021.","ieee":"M. Kismann, D. T. Riedl, and P. D. J. K. Lindner, “Ordered arrays of Si nanopillars with alternating diameters fabricated by nanosphere lithography and metal-assisted chemical etching,” <i>Materials Science in Semiconductor Processing</i>, 2021.","mla":"Kismann, Michael, et al. “Ordered Arrays of Si Nanopillars with Alternating Diameters Fabricated by Nanosphere Lithography and Metal-Assisted Chemical Etching.” <i>Materials Science in Semiconductor Processing</i>, 2021.","ama":"Kismann M, Riedl DT, Lindner PDJK. Ordered arrays of Si nanopillars with alternating diameters fabricated by nanosphere lithography and metal-assisted chemical etching. <i>Materials Science in Semiconductor Processing</i>. 2021.","apa":"Kismann, M., Riedl, D. T., &#38; Lindner, P. D. J. K. (2021). Ordered arrays of Si nanopillars with alternating diameters fabricated by nanosphere lithography and metal-assisted chemical etching. <i>Materials Science in Semiconductor Processing</i>."},"user_id":"77496","date_created":"2021-02-02T16:41:11Z"}