[{"year":"2014","citation":{"ieee":"G. Adam and D. Zimmer, “Systematic investigations of minimum feature sizes and geometrical accuracies,” 2014.","chicago":"Adam, Guido, and Detmar Zimmer. “Systematic Investigations of Minimum Feature Sizes and Geometrical Accuracies,” 2014.","ama":"Adam G, Zimmer D. Systematic investigations of minimum feature sizes and geometrical accuracies. In: ; 2014.","apa":"Adam, G., &#38; Zimmer, D. (2014). Systematic investigations of minimum feature sizes and geometrical accuracies.","mla":"Adam, Guido, and Detmar Zimmer. <i>Systematic Investigations of Minimum Feature Sizes and Geometrical Accuracies</i>. 2014.","bibtex":"@inproceedings{Adam_Zimmer_2014, title={Systematic investigations of minimum feature sizes and geometrical accuracies}, author={Adam, Guido and Zimmer, Detmar}, year={2014} }","short":"G. Adam, D. Zimmer, in: 2014."},"title":"Systematic investigations of minimum feature sizes and geometrical accuracies","date_updated":"2022-01-06T06:55:32Z","author":[{"first_name":"Guido","last_name":"Adam","full_name":"Adam, Guido"},{"first_name":"Detmar","last_name":"Zimmer","id":"604","full_name":"Zimmer, Detmar"}],"date_created":"2021-06-15T11:09:07Z","status":"public","type":"conference","language":[{"iso":"eng"}],"_id":"22383","user_id":"38077","department":[{"_id":"9"},{"_id":"146"},{"_id":"219"},{"_id":"624"}]}]