conference paper Guido Adam author Detmar Zimmer author 604 9 department 146 department 219 department 624 department 2014 eng G. Adam and D. Zimmer, “Systematic investigations of minimum feature sizes and geometrical accuracies,” 2014. Adam, Guido, and Detmar Zimmer. “Systematic Investigations of Minimum Feature Sizes and Geometrical Accuracies,” 2014. Adam G, Zimmer D. Systematic investigations of minimum feature sizes and geometrical accuracies. In: ; 2014. G. Adam, D. Zimmer, in: 2014. @inproceedings{Adam_Zimmer_2014, title={Systematic investigations of minimum feature sizes and geometrical accuracies}, author={Adam, Guido and Zimmer, Detmar}, year={2014} } Adam, Guido, and Detmar Zimmer. <i>Systematic Investigations of Minimum Feature Sizes and Geometrical Accuracies</i>. 2014. Adam, G., &#38; Zimmer, D. (2014). Systematic investigations of minimum feature sizes and geometrical accuracies. 223832021-06-15T11:09:07Z2022-01-06T06:55:32Z