---
_id: '22383'
author:
- first_name: Guido
  full_name: Adam, Guido
  last_name: Adam
- first_name: Detmar
  full_name: Zimmer, Detmar
  id: '604'
  last_name: Zimmer
citation:
  ama: 'Adam G, Zimmer D. Systematic investigations of minimum feature sizes and geometrical
    accuracies. In: ; 2014.'
  apa: Adam, G., &#38; Zimmer, D. (2014). Systematic investigations of minimum feature
    sizes and geometrical accuracies.
  bibtex: '@inproceedings{Adam_Zimmer_2014, title={Systematic investigations of minimum
    feature sizes and geometrical accuracies}, author={Adam, Guido and Zimmer, Detmar},
    year={2014} }'
  chicago: Adam, Guido, and Detmar Zimmer. “Systematic Investigations of Minimum Feature
    Sizes and Geometrical Accuracies,” 2014.
  ieee: G. Adam and D. Zimmer, “Systematic investigations of minimum feature sizes
    and geometrical accuracies,” 2014.
  mla: Adam, Guido, and Detmar Zimmer. <i>Systematic Investigations of Minimum Feature
    Sizes and Geometrical Accuracies</i>. 2014.
  short: 'G. Adam, D. Zimmer, in: 2014.'
date_created: 2021-06-15T11:09:07Z
date_updated: 2022-01-06T06:55:32Z
department:
- _id: '9'
- _id: '146'
- _id: '219'
- _id: '624'
language:
- iso: eng
status: public
title: Systematic investigations of minimum feature sizes and geometrical accuracies
type: conference
user_id: '38077'
year: '2014'
...
