@article{22537, author = {{Hoppe, C and Mitschker, F and Butterling, M and Liedke, M O and de los Arcos de Pedro, Maria Teresa and Awakowicz, P and Wagner, A and Grundmeier, Guido}}, issn = {{0022-3727}}, journal = {{Journal of Physics D: Applied Physics}}, title = {{{Characterisation of micropores in plasma deposited SiO x films by means of positron annihilation lifetime spectroscopy}}}, doi = {{10.1088/1361-6463/aba8ba}}, year = {{2020}}, }