{"_id":"22538","title":"Review of infrared spectroscopy techniques for the determination of internal structure in thin SiO2 films","department":[{"_id":"302"}],"publication_identifier":{"issn":["0924-2031"]},"date_created":"2021-07-07T08:37:38Z","user_id":"54556","citation":{"bibtex":"@article{de los Arcos de Pedro_Müller_Wang_Damerla_Hoppe_Weinberger_Tiemann_Grundmeier_2021, title={Review of infrared spectroscopy techniques for the determination of internal structure in thin SiO2 films}, DOI={<a href=\"https://doi.org/10.1016/j.vibspec.2021.103256\">10.1016/j.vibspec.2021.103256</a>}, number={103256}, journal={Vibrational Spectroscopy}, author={de los Arcos de Pedro, Maria Teresa and Müller, Hendrik and Wang, Fuzeng and Damerla, Varun Raj and Hoppe, Christian and Weinberger, Christian and Tiemann, Michael and Grundmeier, Guido}, year={2021} }","mla":"de los Arcos de Pedro, Maria Teresa, et al. “Review of Infrared Spectroscopy Techniques for the Determination of Internal Structure in Thin SiO2 Films.” <i>Vibrational Spectroscopy</i>, 103256, 2021, doi:<a href=\"https://doi.org/10.1016/j.vibspec.2021.103256\">10.1016/j.vibspec.2021.103256</a>.","ama":"de los Arcos de Pedro MT, Müller H, Wang F, et al. Review of infrared spectroscopy techniques for the determination of internal structure in thin SiO2 films. <i>Vibrational Spectroscopy</i>. Published online 2021. doi:<a href=\"https://doi.org/10.1016/j.vibspec.2021.103256\">10.1016/j.vibspec.2021.103256</a>","ieee":"M. T. de los Arcos de Pedro <i>et al.</i>, “Review of infrared spectroscopy techniques for the determination of internal structure in thin SiO2 films,” <i>Vibrational Spectroscopy</i>, Art. no. 103256, 2021, doi: <a href=\"https://doi.org/10.1016/j.vibspec.2021.103256\">10.1016/j.vibspec.2021.103256</a>.","chicago":"Arcos de Pedro, Maria Teresa de los, Hendrik Müller, Fuzeng Wang, Varun Raj Damerla, Christian Hoppe, Christian Weinberger, Michael Tiemann, and Guido Grundmeier. “Review of Infrared Spectroscopy Techniques for the Determination of Internal Structure in Thin SiO2 Films.” <i>Vibrational Spectroscopy</i>, 2021. <a href=\"https://doi.org/10.1016/j.vibspec.2021.103256\">https://doi.org/10.1016/j.vibspec.2021.103256</a>.","short":"M.T. de los Arcos de Pedro, H. Müller, F. Wang, V.R. Damerla, C. Hoppe, C. Weinberger, M. Tiemann, G. Grundmeier, Vibrational Spectroscopy (2021).","apa":"de los Arcos de Pedro, M. T., Müller, H., Wang, F., Damerla, V. R., Hoppe, C., Weinberger, C., Tiemann, M., &#38; Grundmeier, G. (2021). Review of infrared spectroscopy techniques for the determination of internal structure in thin SiO2 films. <i>Vibrational Spectroscopy</i>, Article 103256. <a href=\"https://doi.org/10.1016/j.vibspec.2021.103256\">https://doi.org/10.1016/j.vibspec.2021.103256</a>"},"year":"2021","status":"public","author":[{"first_name":"Maria Teresa","full_name":"de los Arcos de Pedro, Maria Teresa","last_name":"de los Arcos de Pedro","id":"54556"},{"full_name":"Müller, Hendrik","last_name":"Müller","first_name":"Hendrik"},{"first_name":"Fuzeng","last_name":"Wang","full_name":"Wang, Fuzeng"},{"last_name":"Damerla","full_name":"Damerla, Varun Raj","first_name":"Varun Raj"},{"first_name":"Christian","last_name":"Hoppe","full_name":"Hoppe, Christian"},{"first_name":"Christian","full_name":"Weinberger, Christian","last_name":"Weinberger"},{"first_name":"Michael","full_name":"Tiemann, Michael","last_name":"Tiemann"},{"last_name":"Grundmeier","full_name":"Grundmeier, Guido","first_name":"Guido"}],"doi":"10.1016/j.vibspec.2021.103256","article_number":"103256","type":"journal_article","date_updated":"2023-01-24T08:32:59Z","publication":"Vibrational Spectroscopy","language":[{"iso":"eng"}],"publication_status":"published"}