@article{22542, author = {{Kirchheim, Dennis and Wilski, Stefan and Jaritz, Montgomery and Mitschker, Felix and Oberberg, Moritz and Trieschmann, Jan and Banko, Lars and Brochhagen, Markus and Schreckenberg, Rabea and Hopmann, Christian and Böke, Marc and Benedikt, Jan and de los Arcos de Pedro, Maria Teresa and Grundmeier, Guido and Grochla, Dario and Ludwig, Alfred and Mussenbrock, Thomas and Brinkmann, Ralf Peter and Awakowicz, Peter and Dahlmann, Rainer}}, issn = {{1547-0091}}, journal = {{Journal of Coatings Technology and Research}}, pages = {{573--583}}, title = {{{Improved homogeneity of plasma and coating properties using a lance matrix gas distribution in MW-PECVD}}}, doi = {{10.1007/s11998-018-0138-4}}, year = {{2018}}, }