Improved homogeneity of plasma and coating properties using a lance matrix gas distribution in MW-PECVD
D. Kirchheim, S. Wilski, M. Jaritz, F. Mitschker, M. Oberberg, J. Trieschmann, L. Banko, M. Brochhagen, R. Schreckenberg, C. Hopmann, M. Böke, J. Benedikt, M.T. de los Arcos de Pedro, G. Grundmeier, D. Grochla, A. Ludwig, T. Mussenbrock, R.P. Brinkmann, P. Awakowicz, R. Dahlmann, Journal of Coatings Technology and Research (2018) 573–583.