{"publication_status":"published","department":[{"_id":"302"}],"doi":"10.1088/1361-6595/aad0e2","article_number":"084004","publication":"Plasma Sources Science and Technology","date_created":"2021-07-07T09:02:04Z","publication_identifier":{"issn":["1361-6595"]},"language":[{"iso":"eng"}],"citation":{"apa":"Layes, V., Corbella, C., Monjé, S., Schulz-von der Gathen, V., von Keudell, A., &#38; de los Arcos de Pedro, M. T. (2018). Connection between target poisoning and current waveforms in reactive high-power impulse magnetron sputtering of chromium. <i>Plasma Sources Science and Technology</i>, Article 084004. <a href=\"https://doi.org/10.1088/1361-6595/aad0e2\">https://doi.org/10.1088/1361-6595/aad0e2</a>","ama":"Layes V, Corbella C, Monjé S, Schulz-von der Gathen V, von Keudell A, de los Arcos de Pedro MT. Connection between target poisoning and current waveforms in reactive high-power impulse magnetron sputtering of chromium. <i>Plasma Sources Science and Technology</i>. Published online 2018. doi:<a href=\"https://doi.org/10.1088/1361-6595/aad0e2\">10.1088/1361-6595/aad0e2</a>","short":"V. Layes, C. Corbella, S. Monjé, V. Schulz-von der Gathen, A. von Keudell, M.T. de los Arcos de Pedro, Plasma Sources Science and Technology (2018).","ieee":"V. Layes, C. Corbella, S. Monjé, V. Schulz-von der Gathen, A. von Keudell, and M. T. de los Arcos de Pedro, “Connection between target poisoning and current waveforms in reactive high-power impulse magnetron sputtering of chromium,” <i>Plasma Sources Science and Technology</i>, Art. no. 084004, 2018, doi: <a href=\"https://doi.org/10.1088/1361-6595/aad0e2\">10.1088/1361-6595/aad0e2</a>.","mla":"Layes, Vincent, et al. “Connection between Target Poisoning and Current Waveforms in Reactive High-Power Impulse Magnetron Sputtering of Chromium.” <i>Plasma Sources Science and Technology</i>, 084004, 2018, doi:<a href=\"https://doi.org/10.1088/1361-6595/aad0e2\">10.1088/1361-6595/aad0e2</a>.","chicago":"Layes, Vincent, Carles Corbella, Sascha Monjé, Volker Schulz-von der Gathen, Achim von Keudell, and Maria Teresa de los Arcos de Pedro. “Connection between Target Poisoning and Current Waveforms in Reactive High-Power Impulse Magnetron Sputtering of Chromium.” <i>Plasma Sources Science and Technology</i>, 2018. <a href=\"https://doi.org/10.1088/1361-6595/aad0e2\">https://doi.org/10.1088/1361-6595/aad0e2</a>.","bibtex":"@article{Layes_Corbella_Monjé_Schulz-von der Gathen_von Keudell_de los Arcos de Pedro_2018, title={Connection between target poisoning and current waveforms in reactive high-power impulse magnetron sputtering of chromium}, DOI={<a href=\"https://doi.org/10.1088/1361-6595/aad0e2\">10.1088/1361-6595/aad0e2</a>}, number={084004}, journal={Plasma Sources Science and Technology}, author={Layes, Vincent and Corbella, Carles and Monjé, Sascha and Schulz-von der Gathen, Volker and von Keudell, Achim and de los Arcos de Pedro, Maria Teresa}, year={2018} }"},"year":"2018","_id":"22556","type":"journal_article","user_id":"54556","title":"Connection between target poisoning and current waveforms in reactive high-power impulse magnetron sputtering of chromium","date_updated":"2023-01-24T08:39:29Z","status":"public","author":[{"first_name":"Vincent","last_name":"Layes","full_name":"Layes, Vincent"},{"first_name":"Carles","last_name":"Corbella","full_name":"Corbella, Carles"},{"last_name":"Monjé","first_name":"Sascha","full_name":"Monjé, Sascha"},{"full_name":"Schulz-von der Gathen, Volker","first_name":"Volker","last_name":"Schulz-von der Gathen"},{"first_name":"Achim","last_name":"von Keudell","full_name":"von Keudell, Achim"},{"full_name":"de los Arcos de Pedro, Maria Teresa","last_name":"de los Arcos de Pedro","first_name":"Maria Teresa","id":"54556"}]}