{"type":"journal_article","title":"Comparative study on the deposition of silicon oxide permeation barrier coatings for polymers using hexamethyldisilazane (HMDSN) and hexamethyldisiloxane (HMDSO)","author":[{"first_name":"F","last_name":"Mitschker","full_name":"Mitschker, F"},{"full_name":"Schücke, L","last_name":"Schücke","first_name":"L"},{"first_name":"Ch","full_name":"Hoppe, Ch","last_name":"Hoppe"},{"first_name":"M","last_name":"Jaritz","full_name":"Jaritz, M"},{"first_name":"R","full_name":"Dahlmann, R","last_name":"Dahlmann"},{"full_name":"de los Arcos de Pedro, Maria Teresa","last_name":"de los Arcos de Pedro","id":"54556","first_name":"Maria Teresa"},{"first_name":"Ch","full_name":"Hopmann, Ch","last_name":"Hopmann"},{"id":"194","first_name":"Guido","last_name":"Grundmeier","full_name":"Grundmeier, Guido"},{"first_name":"P","full_name":"Awakowicz, P","last_name":"Awakowicz"}],"department":[{"_id":"302"}],"date_created":"2021-07-07T09:02:43Z","publication":"Journal of Physics D: Applied Physics","user_id":"54556","doi":"10.1088/1361-6463/aac0ab","_id":"22558","article_number":"235201","language":[{"iso":"eng"}],"status":"public","date_updated":"2023-01-24T08:40:05Z","publication_status":"published","publication_identifier":{"issn":["0022-3727","1361-6463"]},"year":"2018","citation":{"short":"F. Mitschker, L. Schücke, C. Hoppe, M. Jaritz, R. Dahlmann, M.T. de los Arcos de Pedro, C. Hopmann, G. Grundmeier, P. Awakowicz, Journal of Physics D: Applied Physics (2018).","ama":"Mitschker F, Schücke L, Hoppe C, et al. Comparative study on the deposition of silicon oxide permeation barrier coatings for polymers using hexamethyldisilazane (HMDSN) and hexamethyldisiloxane (HMDSO). <i>Journal of Physics D: Applied Physics</i>. Published online 2018. doi:<a href=\"https://doi.org/10.1088/1361-6463/aac0ab\">10.1088/1361-6463/aac0ab</a>","apa":"Mitschker, F., Schücke, L., Hoppe, C., Jaritz, M., Dahlmann, R., de los Arcos de Pedro, M. T., Hopmann, C., Grundmeier, G., &#38; Awakowicz, P. (2018). Comparative study on the deposition of silicon oxide permeation barrier coatings for polymers using hexamethyldisilazane (HMDSN) and hexamethyldisiloxane (HMDSO). <i>Journal of Physics D: Applied Physics</i>, Article 235201. <a href=\"https://doi.org/10.1088/1361-6463/aac0ab\">https://doi.org/10.1088/1361-6463/aac0ab</a>","chicago":"Mitschker, F, L Schücke, Ch Hoppe, M Jaritz, R Dahlmann, Maria Teresa de los Arcos de Pedro, Ch Hopmann, Guido Grundmeier, and P Awakowicz. “Comparative Study on the Deposition of Silicon Oxide Permeation Barrier Coatings for Polymers Using Hexamethyldisilazane (HMDSN) and Hexamethyldisiloxane (HMDSO).” <i>Journal of Physics D: Applied Physics</i>, 2018. <a href=\"https://doi.org/10.1088/1361-6463/aac0ab\">https://doi.org/10.1088/1361-6463/aac0ab</a>.","mla":"Mitschker, F., et al. “Comparative Study on the Deposition of Silicon Oxide Permeation Barrier Coatings for Polymers Using Hexamethyldisilazane (HMDSN) and Hexamethyldisiloxane (HMDSO).” <i>Journal of Physics D: Applied Physics</i>, 235201, 2018, doi:<a href=\"https://doi.org/10.1088/1361-6463/aac0ab\">10.1088/1361-6463/aac0ab</a>.","bibtex":"@article{Mitschker_Schücke_Hoppe_Jaritz_Dahlmann_de los Arcos de Pedro_Hopmann_Grundmeier_Awakowicz_2018, title={Comparative study on the deposition of silicon oxide permeation barrier coatings for polymers using hexamethyldisilazane (HMDSN) and hexamethyldisiloxane (HMDSO)}, DOI={<a href=\"https://doi.org/10.1088/1361-6463/aac0ab\">10.1088/1361-6463/aac0ab</a>}, number={235201}, journal={Journal of Physics D: Applied Physics}, author={Mitschker, F and Schücke, L and Hoppe, Ch and Jaritz, M and Dahlmann, R and de los Arcos de Pedro, Maria Teresa and Hopmann, Ch and Grundmeier, Guido and Awakowicz, P}, year={2018} }","ieee":"F. Mitschker <i>et al.</i>, “Comparative study on the deposition of silicon oxide permeation barrier coatings for polymers using hexamethyldisilazane (HMDSN) and hexamethyldisiloxane (HMDSO),” <i>Journal of Physics D: Applied Physics</i>, Art. no. 235201, 2018, doi: <a href=\"https://doi.org/10.1088/1361-6463/aac0ab\">10.1088/1361-6463/aac0ab</a>."}}