{"publication":"Journal of Physics D: Applied Physics","title":"Comparative study on the deposition of silicon oxide permeation barrier coatings for polymers using hexamethyldisilazane (HMDSN) and hexamethyldisiloxane (HMDSO)","date_updated":"2023-01-24T08:40:05Z","language":[{"iso":"eng"}],"department":[{"_id":"302"}],"article_number":"235201","citation":{"chicago":"Mitschker, F, L Schücke, Ch Hoppe, M Jaritz, R Dahlmann, Maria Teresa de los Arcos de Pedro, Ch Hopmann, Guido Grundmeier, and P Awakowicz. “Comparative Study on the Deposition of Silicon Oxide Permeation Barrier Coatings for Polymers Using Hexamethyldisilazane (HMDSN) and Hexamethyldisiloxane (HMDSO).” Journal of Physics D: Applied Physics, 2018. https://doi.org/10.1088/1361-6463/aac0ab.","mla":"Mitschker, F., et al. “Comparative Study on the Deposition of Silicon Oxide Permeation Barrier Coatings for Polymers Using Hexamethyldisilazane (HMDSN) and Hexamethyldisiloxane (HMDSO).” Journal of Physics D: Applied Physics, 235201, 2018, doi:10.1088/1361-6463/aac0ab.","apa":"Mitschker, F., Schücke, L., Hoppe, C., Jaritz, M., Dahlmann, R., de los Arcos de Pedro, M. T., Hopmann, C., Grundmeier, G., & Awakowicz, P. (2018). Comparative study on the deposition of silicon oxide permeation barrier coatings for polymers using hexamethyldisilazane (HMDSN) and hexamethyldisiloxane (HMDSO). Journal of Physics D: Applied Physics, Article 235201. https://doi.org/10.1088/1361-6463/aac0ab","short":"F. Mitschker, L. Schücke, C. Hoppe, M. Jaritz, R. Dahlmann, M.T. de los Arcos de Pedro, C. Hopmann, G. Grundmeier, P. Awakowicz, Journal of Physics D: Applied Physics (2018).","ieee":"F. Mitschker et al., “Comparative study on the deposition of silicon oxide permeation barrier coatings for polymers using hexamethyldisilazane (HMDSN) and hexamethyldisiloxane (HMDSO),” Journal of Physics D: Applied Physics, Art. no. 235201, 2018, doi: 10.1088/1361-6463/aac0ab.","bibtex":"@article{Mitschker_Schücke_Hoppe_Jaritz_Dahlmann_de los Arcos de Pedro_Hopmann_Grundmeier_Awakowicz_2018, title={Comparative study on the deposition of silicon oxide permeation barrier coatings for polymers using hexamethyldisilazane (HMDSN) and hexamethyldisiloxane (HMDSO)}, DOI={10.1088/1361-6463/aac0ab}, number={235201}, journal={Journal of Physics D: Applied Physics}, author={Mitschker, F and Schücke, L and Hoppe, Ch and Jaritz, M and Dahlmann, R and de los Arcos de Pedro, Maria Teresa and Hopmann, Ch and Grundmeier, Guido and Awakowicz, P}, year={2018} }","ama":"Mitschker F, Schücke L, Hoppe C, et al. Comparative study on the deposition of silicon oxide permeation barrier coatings for polymers using hexamethyldisilazane (HMDSN) and hexamethyldisiloxane (HMDSO). Journal of Physics D: Applied Physics. Published online 2018. doi:10.1088/1361-6463/aac0ab"},"type":"journal_article","publication_identifier":{"issn":["0022-3727","1361-6463"]},"user_id":"54556","year":"2018","author":[{"first_name":"F","full_name":"Mitschker, F","last_name":"Mitschker"},{"full_name":"Schücke, L","last_name":"Schücke","first_name":"L"},{"last_name":"Hoppe","full_name":"Hoppe, Ch","first_name":"Ch"},{"full_name":"Jaritz, M","last_name":"Jaritz","first_name":"M"},{"last_name":"Dahlmann","full_name":"Dahlmann, R","first_name":"R"},{"full_name":"de los Arcos de Pedro, Maria Teresa","last_name":"de los Arcos de Pedro","first_name":"Maria Teresa","id":"54556"},{"first_name":"Ch","last_name":"Hopmann","full_name":"Hopmann, Ch"},{"full_name":"Grundmeier, Guido","last_name":"Grundmeier","first_name":"Guido","id":"194"},{"last_name":"Awakowicz","full_name":"Awakowicz, P","first_name":"P"}],"status":"public","_id":"22558","publication_status":"published","doi":"10.1088/1361-6463/aac0ab","date_created":"2021-07-07T09:02:43Z"}