TY - JOUR AU - Mitschker, F AU - Wißing, J AU - Hoppe, Ch AU - de los Arcos de Pedro, Maria Teresa AU - Grundmeier, Guido AU - Awakowicz, P ID - 22559 JF - Journal of Physics D: Applied Physics SN - 0022-3727 TI - Influence of average ion energy and atomic oxygen flux per Si atom on the formation of silicon oxide permeation barrier coatings on PET ER -