@article{22566, author = {{Hoppe, C and Mitschker, F and Giner, I and de los Arcos de Pedro, Maria Teresa and Awakowicz, P and Grundmeier, G}}, issn = {{0022-3727}}, journal = {{Journal of Physics D: Applied Physics}}, title = {{{Influence of organic surface chemistry on the nucleation of plasma deposited SiOxfilms}}}, doi = {{10.1088/1361-6463/aa69e5}}, year = {{2017}}, }