@article{22568, author = {{Layes, V. and Monje, S. and Corbella, C. and Trieschmann, J. and de los Arcos de Pedro, Maria Teresa and von Keudell, A.}}, issn = {{0003-6951}}, journal = {{Applied Physics Letters}}, title = {{{Species transport on the target during high power impulse magnetron sputtering}}}, doi = {{10.1063/1.4976999}}, year = {{2017}}, }