{"publication_status":"published","date_created":"2021-07-07T09:08:37Z","status":"public","type":"journal_article","doi":"10.1063/1.4976999","article_number":"081603","citation":{"mla":"Layes, V., et al. “Species Transport on the Target during High Power Impulse Magnetron Sputtering.” <i>Applied Physics Letters</i>, 081603, 2017, doi:<a href=\"https://doi.org/10.1063/1.4976999\">10.1063/1.4976999</a>.","apa":"Layes, V., Monje, S., Corbella, C., Trieschmann, J., de los Arcos de Pedro, M. T., &#38; von Keudell, A. (2017). Species transport on the target during high power impulse magnetron sputtering. <i>Applied Physics Letters</i>, Article 081603. <a href=\"https://doi.org/10.1063/1.4976999\">https://doi.org/10.1063/1.4976999</a>","bibtex":"@article{Layes_Monje_Corbella_Trieschmann_de los Arcos de Pedro_von Keudell_2017, title={Species transport on the target during high power impulse magnetron sputtering}, DOI={<a href=\"https://doi.org/10.1063/1.4976999\">10.1063/1.4976999</a>}, number={081603}, journal={Applied Physics Letters}, author={Layes, V. and Monje, S. and Corbella, C. and Trieschmann, J. and de los Arcos de Pedro, Maria Teresa and von Keudell, A.}, year={2017} }","ieee":"V. Layes, S. Monje, C. Corbella, J. Trieschmann, M. T. de los Arcos de Pedro, and A. von Keudell, “Species transport on the target during high power impulse magnetron sputtering,” <i>Applied Physics Letters</i>, Art. no. 081603, 2017, doi: <a href=\"https://doi.org/10.1063/1.4976999\">10.1063/1.4976999</a>.","ama":"Layes V, Monje S, Corbella C, Trieschmann J, de los Arcos de Pedro MT, von Keudell A. Species transport on the target during high power impulse magnetron sputtering. <i>Applied Physics Letters</i>. Published online 2017. doi:<a href=\"https://doi.org/10.1063/1.4976999\">10.1063/1.4976999</a>","short":"V. Layes, S. Monje, C. Corbella, J. Trieschmann, M.T. de los Arcos de Pedro, A. von Keudell, Applied Physics Letters (2017).","chicago":"Layes, V., S. Monje, C. Corbella, J. Trieschmann, Maria Teresa de los Arcos de Pedro, and A. von Keudell. “Species Transport on the Target during High Power Impulse Magnetron Sputtering.” <i>Applied Physics Letters</i>, 2017. <a href=\"https://doi.org/10.1063/1.4976999\">https://doi.org/10.1063/1.4976999</a>."},"date_updated":"2023-01-24T08:13:37Z","publication_identifier":{"issn":["0003-6951","1077-3118"]},"publication":"Applied Physics Letters","language":[{"iso":"eng"}],"_id":"22568","title":"Species transport on the target during high power impulse magnetron sputtering","author":[{"first_name":"V.","last_name":"Layes","full_name":"Layes, V."},{"first_name":"S.","full_name":"Monje, S.","last_name":"Monje"},{"first_name":"C.","full_name":"Corbella, C.","last_name":"Corbella"},{"first_name":"J.","full_name":"Trieschmann, J.","last_name":"Trieschmann"},{"first_name":"Maria Teresa","id":"54556","full_name":"de los Arcos de Pedro, Maria Teresa","last_name":"de los Arcos de Pedro"},{"first_name":"A.","full_name":"von Keudell, A.","last_name":"von Keudell"}],"year":"2017","department":[{"_id":"302"}],"user_id":"54556"}