{"department":[{"_id":"302"}],"doi":"10.1063/1.4977820","publication_status":"published","author":[{"last_name":"Layes","first_name":"Vincent","full_name":"Layes, Vincent"},{"first_name":"Sascha","last_name":"Monje","full_name":"Monje, Sascha"},{"last_name":"Corbella","first_name":"Carles","full_name":"Corbella, Carles"},{"first_name":"Volker","last_name":"Schulz-von der Gathen","full_name":"Schulz-von der Gathen, Volker"},{"first_name":"Achim","last_name":"von Keudell","full_name":"von Keudell, Achim"},{"id":"54556","last_name":"de los Arcos de Pedro","first_name":"Maria Teresa","full_name":"de los Arcos de Pedro, Maria Teresa"}],"status":"public","type":"journal_article","user_id":"54556","date_updated":"2023-01-24T08:14:07Z","title":"Composite targets in HiPIMS plasmas: Correlation of in-vacuum XPS characterization and optical plasma diagnostics","publication_identifier":{"issn":["0021-8979","1089-7550"]},"language":[{"iso":"eng"}],"citation":{"ama":"Layes V, Monje S, Corbella C, Schulz-von der Gathen V, von Keudell A, de los Arcos de Pedro MT. Composite targets in HiPIMS plasmas: Correlation of in-vacuum XPS characterization and optical plasma diagnostics. <i>Journal of Applied Physics</i>. Published online 2017. doi:<a href=\"https://doi.org/10.1063/1.4977820\">10.1063/1.4977820</a>","apa":"Layes, V., Monje, S., Corbella, C., Schulz-von der Gathen, V., von Keudell, A., &#38; de los Arcos de Pedro, M. T. (2017). Composite targets in HiPIMS plasmas: Correlation of in-vacuum XPS characterization and optical plasma diagnostics. <i>Journal of Applied Physics</i>, Article 171912. <a href=\"https://doi.org/10.1063/1.4977820\">https://doi.org/10.1063/1.4977820</a>","ieee":"V. Layes, S. Monje, C. Corbella, V. Schulz-von der Gathen, A. von Keudell, and M. T. de los Arcos de Pedro, “Composite targets in HiPIMS plasmas: Correlation of in-vacuum XPS characterization and optical plasma diagnostics,” <i>Journal of Applied Physics</i>, Art. no. 171912, 2017, doi: <a href=\"https://doi.org/10.1063/1.4977820\">10.1063/1.4977820</a>.","short":"V. Layes, S. Monje, C. Corbella, V. Schulz-von der Gathen, A. von Keudell, M.T. de los Arcos de Pedro, Journal of Applied Physics (2017).","chicago":"Layes, Vincent, Sascha Monje, Carles Corbella, Volker Schulz-von der Gathen, Achim von Keudell, and Maria Teresa de los Arcos de Pedro. “Composite Targets in HiPIMS Plasmas: Correlation of in-Vacuum XPS Characterization and Optical Plasma Diagnostics.” <i>Journal of Applied Physics</i>, 2017. <a href=\"https://doi.org/10.1063/1.4977820\">https://doi.org/10.1063/1.4977820</a>.","mla":"Layes, Vincent, et al. “Composite Targets in HiPIMS Plasmas: Correlation of in-Vacuum XPS Characterization and Optical Plasma Diagnostics.” <i>Journal of Applied Physics</i>, 171912, 2017, doi:<a href=\"https://doi.org/10.1063/1.4977820\">10.1063/1.4977820</a>.","bibtex":"@article{Layes_Monje_Corbella_Schulz-von der Gathen_von Keudell_de los Arcos de Pedro_2017, title={Composite targets in HiPIMS plasmas: Correlation of in-vacuum XPS characterization and optical plasma diagnostics}, DOI={<a href=\"https://doi.org/10.1063/1.4977820\">10.1063/1.4977820</a>}, number={171912}, journal={Journal of Applied Physics}, author={Layes, Vincent and Monje, Sascha and Corbella, Carles and Schulz-von der Gathen, Volker and von Keudell, Achim and de los Arcos de Pedro, Maria Teresa}, year={2017} }"},"year":"2017","_id":"22569","publication":"Journal of Applied Physics","article_number":"171912","date_created":"2021-07-07T09:08:54Z"}