{"author":[{"last_name":"Mitschker","full_name":"Mitschker, F","first_name":"F"},{"full_name":"Steves, S","last_name":"Steves","first_name":"S"},{"first_name":"M","last_name":"Gebhard","full_name":"Gebhard, M"},{"first_name":"M","full_name":"Rudolph, M","last_name":"Rudolph"},{"full_name":"Schücke, L","last_name":"Schücke","first_name":"L"},{"first_name":"D","last_name":"Kirchheim","full_name":"Kirchheim, D"},{"full_name":"Jaritz, M","last_name":"Jaritz","first_name":"M"},{"first_name":"M","last_name":"Brochhagen","full_name":"Brochhagen, M"},{"first_name":"Ch","full_name":"Hoppe, Ch","last_name":"Hoppe"},{"first_name":"R","full_name":"Dahlmann, R","last_name":"Dahlmann"},{"first_name":"M","last_name":"Böke","full_name":"Böke, M"},{"full_name":"Benedikt, J","last_name":"Benedikt","first_name":"J"},{"first_name":"I","last_name":"Giner","full_name":"Giner, I"},{"id":"54556","first_name":"Maria Teresa","last_name":"de los Arcos de Pedro","full_name":"de los Arcos de Pedro, Maria Teresa"},{"first_name":"Ch","last_name":"Hopmann","full_name":"Hopmann, Ch"},{"first_name":"G","last_name":"Grundmeier","full_name":"Grundmeier, G"},{"first_name":"A","full_name":"Devi, A","last_name":"Devi"},{"first_name":"P","last_name":"Awakowicz","full_name":"Awakowicz, P"}],"department":[{"_id":"302"}],"publication_identifier":{"issn":["0022-3727","1361-6463"]},"year":"2017","user_id":"54556","article_number":"235201","publication_status":"published","_id":"22571","title":"Influence of PE-CVD and PE-ALD on defect formation in permeation barrier films on PET and correlation to atomic oxygen fluence","language":[{"iso":"eng"}],"type":"journal_article","citation":{"ama":"Mitschker F, Steves S, Gebhard M, et al. Influence of PE-CVD and PE-ALD on defect formation in permeation barrier films on PET and correlation to atomic oxygen fluence. <i>Journal of Physics D: Applied Physics</i>. Published online 2017. doi:<a href=\"https://doi.org/10.1088/1361-6463/aa6e28\">10.1088/1361-6463/aa6e28</a>","ieee":"F. Mitschker <i>et al.</i>, “Influence of PE-CVD and PE-ALD on defect formation in permeation barrier films on PET and correlation to atomic oxygen fluence,” <i>Journal of Physics D: Applied Physics</i>, Art. no. 235201, 2017, doi: <a href=\"https://doi.org/10.1088/1361-6463/aa6e28\">10.1088/1361-6463/aa6e28</a>.","short":"F. Mitschker, S. Steves, M. Gebhard, M. Rudolph, L. Schücke, D. Kirchheim, M. Jaritz, M. Brochhagen, C. Hoppe, R. Dahlmann, M. Böke, J. Benedikt, I. Giner, M.T. de los Arcos de Pedro, C. Hopmann, G. Grundmeier, A. Devi, P. Awakowicz, Journal of Physics D: Applied Physics (2017).","chicago":"Mitschker, F, S Steves, M Gebhard, M Rudolph, L Schücke, D Kirchheim, M Jaritz, et al. “Influence of PE-CVD and PE-ALD on Defect Formation in Permeation Barrier Films on PET and Correlation to Atomic Oxygen Fluence.” <i>Journal of Physics D: Applied Physics</i>, 2017. <a href=\"https://doi.org/10.1088/1361-6463/aa6e28\">https://doi.org/10.1088/1361-6463/aa6e28</a>.","apa":"Mitschker, F., Steves, S., Gebhard, M., Rudolph, M., Schücke, L., Kirchheim, D., Jaritz, M., Brochhagen, M., Hoppe, C., Dahlmann, R., Böke, M., Benedikt, J., Giner, I., de los Arcos de Pedro, M. T., Hopmann, C., Grundmeier, G., Devi, A., &#38; Awakowicz, P. (2017). Influence of PE-CVD and PE-ALD on defect formation in permeation barrier films on PET and correlation to atomic oxygen fluence. <i>Journal of Physics D: Applied Physics</i>, Article 235201. <a href=\"https://doi.org/10.1088/1361-6463/aa6e28\">https://doi.org/10.1088/1361-6463/aa6e28</a>","bibtex":"@article{Mitschker_Steves_Gebhard_Rudolph_Schücke_Kirchheim_Jaritz_Brochhagen_Hoppe_Dahlmann_et al._2017, title={Influence of PE-CVD and PE-ALD on defect formation in permeation barrier films on PET and correlation to atomic oxygen fluence}, DOI={<a href=\"https://doi.org/10.1088/1361-6463/aa6e28\">10.1088/1361-6463/aa6e28</a>}, number={235201}, journal={Journal of Physics D: Applied Physics}, author={Mitschker, F and Steves, S and Gebhard, M and Rudolph, M and Schücke, L and Kirchheim, D and Jaritz, M and Brochhagen, M and Hoppe, Ch and Dahlmann, R and et al.}, year={2017} }","mla":"Mitschker, F., et al. “Influence of PE-CVD and PE-ALD on Defect Formation in Permeation Barrier Films on PET and Correlation to Atomic Oxygen Fluence.” <i>Journal of Physics D: Applied Physics</i>, 235201, 2017, doi:<a href=\"https://doi.org/10.1088/1361-6463/aa6e28\">10.1088/1361-6463/aa6e28</a>."},"publication":"Journal of Physics D: Applied Physics","date_updated":"2023-01-24T08:15:24Z","doi":"10.1088/1361-6463/aa6e28","date_created":"2021-07-07T09:09:32Z","status":"public"}