[{"title":"Influence of PE-CVD and PE-ALD on defect formation in permeation barrier films on PET and correlation to atomic oxygen fluence","user_id":"54556","author":[{"first_name":"F","last_name":"Mitschker","full_name":"Mitschker, F","sequence":"first"},{"full_name":"Steves, S","sequence":"additional","first_name":"S","last_name":"Steves"},{"last_name":"Gebhard","first_name":"M","full_name":"Gebhard, M","sequence":"additional"},{"sequence":"additional","full_name":"Rudolph, M","last_name":"Rudolph","first_name":"M"},{"full_name":"Schücke, L","sequence":"additional","first_name":"L","last_name":"Schücke"},{"last_name":"Kirchheim","first_name":"D","sequence":"additional","full_name":"Kirchheim, D"},{"last_name":"Jaritz","first_name":"M","full_name":"Jaritz, M","sequence":"additional"},{"full_name":"Brochhagen, M","sequence":"additional","last_name":"Brochhagen","first_name":"M"},{"first_name":"Ch","last_name":"Hoppe","sequence":"additional","full_name":"Hoppe, Ch"},{"sequence":"additional","full_name":"Dahlmann, R","first_name":"R","last_name":"Dahlmann"},{"last_name":"Böke","first_name":"M","sequence":"additional","full_name":"Böke, M"},{"last_name":"Benedikt","first_name":"J","full_name":"Benedikt, J","sequence":"additional"},{"last_name":"Giner","first_name":"I","sequence":"additional","full_name":"Giner, I"},{"first_name":"T","last_name":"de los Arcos","full_name":"de los Arcos, T","sequence":"additional"},{"first_name":"Ch","last_name":"Hopmann","full_name":"Hopmann, Ch","sequence":"additional"},{"last_name":"Grundmeier","first_name":"G","full_name":"Grundmeier, G","sequence":"additional"},{"last_name":"Devi","first_name":"A","full_name":"Devi, A","sequence":"additional"},{"sequence":"additional","full_name":"Awakowicz, P","last_name":"Awakowicz","first_name":"P"}],"_id":"22571","type":"journal_article","status":"public","publication":"Journal of Physics D: Applied Physics","article_number":"235201","publication_status":"published","publication_identifier":{"issn":["0022-3727","1361-6463"]},"doi":"10.1088/1361-6463/aa6e28","date_updated":"2021-07-07T09:18:40Z","year":"2017","department":[{"_id":"302"}],"citation":{"apa":"Mitschker, F., Steves, S., Gebhard, M., Rudolph, M., Schücke, L., Kirchheim, D., … Awakowicz, P. (2017). Influence of PE-CVD and PE-ALD on defect formation in permeation barrier films on PET and correlation to atomic oxygen fluence. <i>Journal of Physics D: Applied Physics</i>. <a href=\"https://doi.org/10.1088/1361-6463/aa6e28\">https://doi.org/10.1088/1361-6463/aa6e28</a>","bibtex":"@article{Mitschker_Steves_Gebhard_Rudolph_Schücke_Kirchheim_Jaritz_Brochhagen_Hoppe_Dahlmann_et al._2017, title={Influence of PE-CVD and PE-ALD on defect formation in permeation barrier films on PET and correlation to atomic oxygen fluence}, DOI={<a href=\"https://doi.org/10.1088/1361-6463/aa6e28\">10.1088/1361-6463/aa6e28</a>}, number={235201}, journal={Journal of Physics D: Applied Physics}, author={Mitschker, F and Steves, S and Gebhard, M and Rudolph, M and Schücke, L and Kirchheim, D and Jaritz, M and Brochhagen, M and Hoppe, Ch and Dahlmann, R and et al.}, year={2017} }","chicago":"Mitschker, F, S Steves, M Gebhard, M Rudolph, L Schücke, D Kirchheim, M Jaritz, et al. “Influence of PE-CVD and PE-ALD on Defect Formation in Permeation Barrier Films on PET and Correlation to Atomic Oxygen Fluence.” <i>Journal of Physics D: Applied Physics</i>, 2017. <a href=\"https://doi.org/10.1088/1361-6463/aa6e28\">https://doi.org/10.1088/1361-6463/aa6e28</a>.","ama":"Mitschker F, Steves S, Gebhard M, et al. Influence of PE-CVD and PE-ALD on defect formation in permeation barrier films on PET and correlation to atomic oxygen fluence. <i>Journal of Physics D: Applied Physics</i>. 2017. doi:<a href=\"https://doi.org/10.1088/1361-6463/aa6e28\">10.1088/1361-6463/aa6e28</a>","short":"F. Mitschker, S. Steves, M. Gebhard, M. Rudolph, L. Schücke, D. Kirchheim, M. Jaritz, M. Brochhagen, C. Hoppe, R. Dahlmann, M. Böke, J. Benedikt, I. Giner, T. de los Arcos, C. Hopmann, G. Grundmeier, A. Devi, P. Awakowicz, Journal of Physics D: Applied Physics (2017).","ieee":"F. Mitschker <i>et al.</i>, “Influence of PE-CVD and PE-ALD on defect formation in permeation barrier films on PET and correlation to atomic oxygen fluence,” <i>Journal of Physics D: Applied Physics</i>, 2017.","mla":"Mitschker, F., et al. “Influence of PE-CVD and PE-ALD on Defect Formation in Permeation Barrier Films on PET and Correlation to Atomic Oxygen Fluence.” <i>Journal of Physics D: Applied Physics</i>, 235201, 2017, doi:<a href=\"https://doi.org/10.1088/1361-6463/aa6e28\">10.1088/1361-6463/aa6e28</a>."},"date_created":"2021-07-07T09:09:32Z"}]