--- _id: '22571' article_number: '235201' author: - first_name: F full_name: Mitschker, F last_name: Mitschker - first_name: S full_name: Steves, S last_name: Steves - first_name: M full_name: Gebhard, M last_name: Gebhard - first_name: M full_name: Rudolph, M last_name: Rudolph - first_name: L full_name: Schücke, L last_name: Schücke - first_name: D full_name: Kirchheim, D last_name: Kirchheim - first_name: M full_name: Jaritz, M last_name: Jaritz - first_name: M full_name: Brochhagen, M last_name: Brochhagen - first_name: Ch full_name: Hoppe, Ch last_name: Hoppe - first_name: R full_name: Dahlmann, R last_name: Dahlmann - first_name: M full_name: Böke, M last_name: Böke - first_name: J full_name: Benedikt, J last_name: Benedikt - first_name: I full_name: Giner, I last_name: Giner - first_name: Maria Teresa full_name: de los Arcos de Pedro, Maria Teresa id: '54556' last_name: de los Arcos de Pedro - first_name: Ch full_name: Hopmann, Ch last_name: Hopmann - first_name: G full_name: Grundmeier, G last_name: Grundmeier - first_name: A full_name: Devi, A last_name: Devi - first_name: P full_name: Awakowicz, P last_name: Awakowicz citation: ama: 'Mitschker F, Steves S, Gebhard M, et al. Influence of PE-CVD and PE-ALD on defect formation in permeation barrier films on PET and correlation to atomic oxygen fluence. Journal of Physics D: Applied Physics. Published online 2017. doi:10.1088/1361-6463/aa6e28' apa: 'Mitschker, F., Steves, S., Gebhard, M., Rudolph, M., Schücke, L., Kirchheim, D., Jaritz, M., Brochhagen, M., Hoppe, C., Dahlmann, R., Böke, M., Benedikt, J., Giner, I., de los Arcos de Pedro, M. T., Hopmann, C., Grundmeier, G., Devi, A., & Awakowicz, P. (2017). Influence of PE-CVD and PE-ALD on defect formation in permeation barrier films on PET and correlation to atomic oxygen fluence. Journal of Physics D: Applied Physics, Article 235201. https://doi.org/10.1088/1361-6463/aa6e28' bibtex: '@article{Mitschker_Steves_Gebhard_Rudolph_Schücke_Kirchheim_Jaritz_Brochhagen_Hoppe_Dahlmann_et al._2017, title={Influence of PE-CVD and PE-ALD on defect formation in permeation barrier films on PET and correlation to atomic oxygen fluence}, DOI={10.1088/1361-6463/aa6e28}, number={235201}, journal={Journal of Physics D: Applied Physics}, author={Mitschker, F and Steves, S and Gebhard, M and Rudolph, M and Schücke, L and Kirchheim, D and Jaritz, M and Brochhagen, M and Hoppe, Ch and Dahlmann, R and et al.}, year={2017} }' chicago: 'Mitschker, F, S Steves, M Gebhard, M Rudolph, L Schücke, D Kirchheim, M Jaritz, et al. “Influence of PE-CVD and PE-ALD on Defect Formation in Permeation Barrier Films on PET and Correlation to Atomic Oxygen Fluence.” Journal of Physics D: Applied Physics, 2017. https://doi.org/10.1088/1361-6463/aa6e28.' ieee: 'F. Mitschker et al., “Influence of PE-CVD and PE-ALD on defect formation in permeation barrier films on PET and correlation to atomic oxygen fluence,” Journal of Physics D: Applied Physics, Art. no. 235201, 2017, doi: 10.1088/1361-6463/aa6e28.' mla: 'Mitschker, F., et al. “Influence of PE-CVD and PE-ALD on Defect Formation in Permeation Barrier Films on PET and Correlation to Atomic Oxygen Fluence.” Journal of Physics D: Applied Physics, 235201, 2017, doi:10.1088/1361-6463/aa6e28.' short: 'F. Mitschker, S. Steves, M. Gebhard, M. Rudolph, L. Schücke, D. Kirchheim, M. Jaritz, M. Brochhagen, C. Hoppe, R. Dahlmann, M. Böke, J. Benedikt, I. Giner, M.T. de los Arcos de Pedro, C. Hopmann, G. Grundmeier, A. Devi, P. Awakowicz, Journal of Physics D: Applied Physics (2017).' date_created: 2021-07-07T09:09:32Z date_updated: 2023-01-24T08:15:24Z department: - _id: '302' doi: 10.1088/1361-6463/aa6e28 language: - iso: eng publication: 'Journal of Physics D: Applied Physics' publication_identifier: issn: - 0022-3727 - 1361-6463 publication_status: published status: public title: Influence of PE-CVD and PE-ALD on defect formation in permeation barrier films on PET and correlation to atomic oxygen fluence type: journal_article user_id: '54556' year: '2017' ...