---
_id: '22571'
article_number: '235201'
author:
- first_name: F
full_name: Mitschker, F
last_name: Mitschker
- first_name: S
full_name: Steves, S
last_name: Steves
- first_name: M
full_name: Gebhard, M
last_name: Gebhard
- first_name: M
full_name: Rudolph, M
last_name: Rudolph
- first_name: L
full_name: Schücke, L
last_name: Schücke
- first_name: D
full_name: Kirchheim, D
last_name: Kirchheim
- first_name: M
full_name: Jaritz, M
last_name: Jaritz
- first_name: M
full_name: Brochhagen, M
last_name: Brochhagen
- first_name: Ch
full_name: Hoppe, Ch
last_name: Hoppe
- first_name: R
full_name: Dahlmann, R
last_name: Dahlmann
- first_name: M
full_name: Böke, M
last_name: Böke
- first_name: J
full_name: Benedikt, J
last_name: Benedikt
- first_name: I
full_name: Giner, I
last_name: Giner
- first_name: Maria Teresa
full_name: de los Arcos de Pedro, Maria Teresa
id: '54556'
last_name: de los Arcos de Pedro
- first_name: Ch
full_name: Hopmann, Ch
last_name: Hopmann
- first_name: G
full_name: Grundmeier, G
last_name: Grundmeier
- first_name: A
full_name: Devi, A
last_name: Devi
- first_name: P
full_name: Awakowicz, P
last_name: Awakowicz
citation:
ama: 'Mitschker F, Steves S, Gebhard M, et al. Influence of PE-CVD and PE-ALD on
defect formation in permeation barrier films on PET and correlation to atomic
oxygen fluence. Journal of Physics D: Applied Physics. Published online
2017. doi:10.1088/1361-6463/aa6e28'
apa: 'Mitschker, F., Steves, S., Gebhard, M., Rudolph, M., Schücke, L., Kirchheim,
D., Jaritz, M., Brochhagen, M., Hoppe, C., Dahlmann, R., Böke, M., Benedikt, J.,
Giner, I., de los Arcos de Pedro, M. T., Hopmann, C., Grundmeier, G., Devi, A.,
& Awakowicz, P. (2017). Influence of PE-CVD and PE-ALD on defect formation
in permeation barrier films on PET and correlation to atomic oxygen fluence. Journal
of Physics D: Applied Physics, Article 235201. https://doi.org/10.1088/1361-6463/aa6e28'
bibtex: '@article{Mitschker_Steves_Gebhard_Rudolph_Schücke_Kirchheim_Jaritz_Brochhagen_Hoppe_Dahlmann_et
al._2017, title={Influence of PE-CVD and PE-ALD on defect formation in permeation
barrier films on PET and correlation to atomic oxygen fluence}, DOI={10.1088/1361-6463/aa6e28},
number={235201}, journal={Journal of Physics D: Applied Physics}, author={Mitschker,
F and Steves, S and Gebhard, M and Rudolph, M and Schücke, L and Kirchheim, D
and Jaritz, M and Brochhagen, M and Hoppe, Ch and Dahlmann, R and et al.}, year={2017}
}'
chicago: 'Mitschker, F, S Steves, M Gebhard, M Rudolph, L Schücke, D Kirchheim,
M Jaritz, et al. “Influence of PE-CVD and PE-ALD on Defect Formation in Permeation
Barrier Films on PET and Correlation to Atomic Oxygen Fluence.” Journal of
Physics D: Applied Physics, 2017. https://doi.org/10.1088/1361-6463/aa6e28.'
ieee: 'F. Mitschker et al., “Influence of PE-CVD and PE-ALD on defect formation
in permeation barrier films on PET and correlation to atomic oxygen fluence,”
Journal of Physics D: Applied Physics, Art. no. 235201, 2017, doi: 10.1088/1361-6463/aa6e28.'
mla: 'Mitschker, F., et al. “Influence of PE-CVD and PE-ALD on Defect Formation
in Permeation Barrier Films on PET and Correlation to Atomic Oxygen Fluence.”
Journal of Physics D: Applied Physics, 235201, 2017, doi:10.1088/1361-6463/aa6e28.'
short: 'F. Mitschker, S. Steves, M. Gebhard, M. Rudolph, L. Schücke, D. Kirchheim,
M. Jaritz, M. Brochhagen, C. Hoppe, R. Dahlmann, M. Böke, J. Benedikt, I. Giner,
M.T. de los Arcos de Pedro, C. Hopmann, G. Grundmeier, A. Devi, P. Awakowicz,
Journal of Physics D: Applied Physics (2017).'
date_created: 2021-07-07T09:09:32Z
date_updated: 2023-01-24T08:15:24Z
department:
- _id: '302'
doi: 10.1088/1361-6463/aa6e28
language:
- iso: eng
publication: 'Journal of Physics D: Applied Physics'
publication_identifier:
issn:
- 0022-3727
- 1361-6463
publication_status: published
status: public
title: Influence of PE-CVD and PE-ALD on defect formation in permeation barrier films
on PET and correlation to atomic oxygen fluence
type: journal_article
user_id: '54556'
year: '2017'
...