TY - JOUR AU - de los Arcos de Pedro, Maria Teresa AU - Schröder, Raphael AU - Gonzalvo, Yolanda Aranda AU - Gathen, Volker Schulz-von der AU - Winter, Jörg ID - 22585 JF - Plasma Sources Science and Technology SN - 0963-0252 TI - Description of HiPIMS plasma regimes in terms of composition, spoke formation and deposition rate ER -