[{"user_id":"54556","extern":"1","status":"public","date_created":"2021-07-07T11:11:23Z","author":[{"first_name":"Nagendra B.","last_name":"Srinivasan"},{"first_name":"Tobias B.","last_name":"Thiede"},{"last_name":"de los Arcos de Pedro","id":"54556","first_name":"Maria Teresa"},{"first_name":"Detlef","last_name":"Rogalla"},{"last_name":"Becker","first_name":"Hans-Werner"},{"first_name":"Anjana","last_name":"Devi"},{"first_name":"Roland A.","last_name":"Fischer"}],"publication":"physica status solidi (a)","_id":"22589","type":"journal_article","citation":{"short":"N.B. Srinivasan, T.B. Thiede, M.T. de los Arcos de Pedro, D. Rogalla, H.-W. Becker, A. Devi, R.A. Fischer, Physica Status Solidi (a) (2013) 260–266.","ieee":"N. B. Srinivasan et al., “MOCVD of tungsten nitride thin films: Comparison of precursor performance and film characteristics,” physica status solidi (a), pp. 260–266, 2013, doi: 10.1002/pssa.201330127.","chicago":"Srinivasan, Nagendra B., Tobias B. Thiede, Maria Teresa de los Arcos de Pedro, Detlef Rogalla, Hans-Werner Becker, Anjana Devi, and Roland A. Fischer. “MOCVD of Tungsten Nitride Thin Films: Comparison of Precursor Performance and Film Characteristics.” Physica Status Solidi (a), 2013, 260–66. https://doi.org/10.1002/pssa.201330127.","apa":"Srinivasan, N. B., Thiede, T. B., de los Arcos de Pedro, M. T., Rogalla, D., Becker, H.-W., Devi, A., & Fischer, R. A. (2013). MOCVD of tungsten nitride thin films: Comparison of precursor performance and film characteristics. Physica Status Solidi (a), 260–266. https://doi.org/10.1002/pssa.201330127","mla":"Srinivasan, Nagendra B., et al. “MOCVD of Tungsten Nitride Thin Films: Comparison of Precursor Performance and Film Characteristics.” Physica Status Solidi (a), 2013, pp. 260–66, doi:10.1002/pssa.201330127.","bibtex":"@article{Srinivasan_Thiede_de los Arcos de Pedro_Rogalla_Becker_Devi_Fischer_2013, title={MOCVD of tungsten nitride thin films: Comparison of precursor performance and film characteristics}, DOI={10.1002/pssa.201330127}, journal={physica status solidi (a)}, author={Srinivasan, Nagendra B. and Thiede, Tobias B. and de los Arcos de Pedro, Maria Teresa and Rogalla, Detlef and Becker, Hans-Werner and Devi, Anjana and Fischer, Roland A.}, year={2013}, pages={260–266} }"},"page":"260-266","uri_base":"https://ris.uni-paderborn.de","dc":{"rights":["info:eu-repo/semantics/closedAccess"],"type":["info:eu-repo/semantics/article","doc-type:article","text","http://purl.org/coar/resource_type/c_6501"],"language":["eng"],"date":["2013"],"relation":["info:eu-repo/semantics/altIdentifier/doi/10.1002/pssa.201330127","info:eu-repo/semantics/altIdentifier/issn/1862-6300"],"identifier":["https://ris.uni-paderborn.de/record/22589"],"creator":["Srinivasan, Nagendra B.","Thiede, Tobias B.","de los Arcos de Pedro, Maria Teresa","Rogalla, Detlef","Becker, Hans-Werner","Devi, Anjana","Fischer, Roland A."],"source":["Srinivasan NB, Thiede TB, de los Arcos de Pedro MT, et al. MOCVD of tungsten nitride thin films: Comparison of precursor performance and film characteristics. physica status solidi (a). Published online 2013:260-266. doi:10.1002/pssa.201330127"],"title":["MOCVD of tungsten nitride thin films: Comparison of precursor performance and film characteristics"]},"publication_status":"published","dini_type":"doc-type:article","publication_identifier":{"issn":[]},"department":[{"_id":"302","tree":[{"_id":"165"},{"_id":"2"},{"_id":"35"},{"_id":"44"},{"_id":"43"}]}],"creator":{"id":"54556","login":"arcos"},"date_updated":"2023-01-24T08:22:27Z","language":[{}]}]