{"language":[{"iso":"eng"}],"publication_status":"published","article_number":"103303","doi":"10.1063/1.4826066","type":"journal_article","date_updated":"2023-01-24T08:22:42Z","publication":"Review of Scientific Instruments","year":"2013","status":"public","author":[{"first_name":"Carles","full_name":"Corbella, Carles","last_name":"Corbella"},{"first_name":"Simon","last_name":"Grosse-Kreul","full_name":"Grosse-Kreul, Simon"},{"first_name":"Oliver","last_name":"Kreiter","full_name":"Kreiter, Oliver"},{"first_name":"Maria Teresa","last_name":"de los Arcos de Pedro","id":"54556","full_name":"de los Arcos de Pedro, Maria Teresa"},{"first_name":"Jan","last_name":"Benedikt","full_name":"Benedikt, Jan"},{"first_name":"Achim","full_name":"von Keudell, Achim","last_name":"von Keudell"}],"extern":"1","title":"Particle beam experiments for the analysis of reactive sputtering processes in metals and polymer surfaces","_id":"22591","department":[{"_id":"302"}],"publication_identifier":{"issn":["0034-6748","1089-7623"]},"date_created":"2021-07-07T11:12:42Z","user_id":"54556","citation":{"apa":"Corbella, C., Grosse-Kreul, S., Kreiter, O., de los Arcos de Pedro, M. T., Benedikt, J., &#38; von Keudell, A. (2013). Particle beam experiments for the analysis of reactive sputtering processes in metals and polymer surfaces. <i>Review of Scientific Instruments</i>, Article 103303. <a href=\"https://doi.org/10.1063/1.4826066\">https://doi.org/10.1063/1.4826066</a>","ama":"Corbella C, Grosse-Kreul S, Kreiter O, de los Arcos de Pedro MT, Benedikt J, von Keudell A. Particle beam experiments for the analysis of reactive sputtering processes in metals and polymer surfaces. <i>Review of Scientific Instruments</i>. Published online 2013. doi:<a href=\"https://doi.org/10.1063/1.4826066\">10.1063/1.4826066</a>","mla":"Corbella, Carles, et al. “Particle Beam Experiments for the Analysis of Reactive Sputtering Processes in Metals and Polymer Surfaces.” <i>Review of Scientific Instruments</i>, 103303, 2013, doi:<a href=\"https://doi.org/10.1063/1.4826066\">10.1063/1.4826066</a>.","ieee":"C. Corbella, S. Grosse-Kreul, O. Kreiter, M. T. de los Arcos de Pedro, J. Benedikt, and A. von Keudell, “Particle beam experiments for the analysis of reactive sputtering processes in metals and polymer surfaces,” <i>Review of Scientific Instruments</i>, Art. no. 103303, 2013, doi: <a href=\"https://doi.org/10.1063/1.4826066\">10.1063/1.4826066</a>.","short":"C. Corbella, S. Grosse-Kreul, O. Kreiter, M.T. de los Arcos de Pedro, J. Benedikt, A. von Keudell, Review of Scientific Instruments (2013).","chicago":"Corbella, Carles, Simon Grosse-Kreul, Oliver Kreiter, Maria Teresa de los Arcos de Pedro, Jan Benedikt, and Achim von Keudell. “Particle Beam Experiments for the Analysis of Reactive Sputtering Processes in Metals and Polymer Surfaces.” <i>Review of Scientific Instruments</i>, 2013. <a href=\"https://doi.org/10.1063/1.4826066\">https://doi.org/10.1063/1.4826066</a>.","bibtex":"@article{Corbella_Grosse-Kreul_Kreiter_de los Arcos de Pedro_Benedikt_von Keudell_2013, title={Particle beam experiments for the analysis of reactive sputtering processes in metals and polymer surfaces}, DOI={<a href=\"https://doi.org/10.1063/1.4826066\">10.1063/1.4826066</a>}, number={103303}, journal={Review of Scientific Instruments}, author={Corbella, Carles and Grosse-Kreul, Simon and Kreiter, Oliver and de los Arcos de Pedro, Maria Teresa and Benedikt, Jan and von Keudell, Achim}, year={2013} }"}}