{"title":"Insight into the Reaction Scheme of SiO2 Film Deposition at Atmospheric Pressure","_id":"22592","publication_identifier":{"issn":["1612-8850"]},"department":[{"_id":"302"}],"user_id":"54556","citation":{"mla":"Rügner, Katja, et al. “Insight into the Reaction Scheme of SiO2 Film Deposition at Atmospheric Pressure.” <i>Plasma Processes and Polymers</i>, 2013, pp. 1061–73, doi:<a href=\"https://doi.org/10.1002/ppap.201300059\">10.1002/ppap.201300059</a>.","ama":"Rügner K, Reuter R, Ellerweg D, de los Arcos de Pedro MT, von Keudell A, Benedikt J. Insight into the Reaction Scheme of SiO2 Film Deposition at Atmospheric Pressure. <i>Plasma Processes and Polymers</i>. Published online 2013:1061-1073. doi:<a href=\"https://doi.org/10.1002/ppap.201300059\">10.1002/ppap.201300059</a>","bibtex":"@article{Rügner_Reuter_Ellerweg_de los Arcos de Pedro_von Keudell_Benedikt_2013, title={Insight into the Reaction Scheme of SiO2 Film Deposition at Atmospheric Pressure}, DOI={<a href=\"https://doi.org/10.1002/ppap.201300059\">10.1002/ppap.201300059</a>}, journal={Plasma Processes and Polymers}, author={Rügner, Katja and Reuter, Rüdiger and Ellerweg, Dirk and de los Arcos de Pedro, Maria Teresa and von Keudell, Achim and Benedikt, Jan}, year={2013}, pages={1061–1073} }","ieee":"K. Rügner, R. Reuter, D. Ellerweg, M. T. de los Arcos de Pedro, A. von Keudell, and J. Benedikt, “Insight into the Reaction Scheme of SiO2 Film Deposition at Atmospheric Pressure,” <i>Plasma Processes and Polymers</i>, pp. 1061–1073, 2013, doi: <a href=\"https://doi.org/10.1002/ppap.201300059\">10.1002/ppap.201300059</a>.","short":"K. Rügner, R. Reuter, D. Ellerweg, M.T. de los Arcos de Pedro, A. von Keudell, J. Benedikt, Plasma Processes and Polymers (2013) 1061–1073.","apa":"Rügner, K., Reuter, R., Ellerweg, D., de los Arcos de Pedro, M. T., von Keudell, A., &#38; Benedikt, J. (2013). Insight into the Reaction Scheme of SiO2 Film Deposition at Atmospheric Pressure. <i>Plasma Processes and Polymers</i>, 1061–1073. <a href=\"https://doi.org/10.1002/ppap.201300059\">https://doi.org/10.1002/ppap.201300059</a>","chicago":"Rügner, Katja, Rüdiger Reuter, Dirk Ellerweg, Maria Teresa de los Arcos de Pedro, Achim von Keudell, and Jan Benedikt. “Insight into the Reaction Scheme of SiO2 Film Deposition at Atmospheric Pressure.” <i>Plasma Processes and Polymers</i>, 2013, 1061–73. <a href=\"https://doi.org/10.1002/ppap.201300059\">https://doi.org/10.1002/ppap.201300059</a>."},"date_created":"2021-07-07T11:13:20Z","status":"public","year":"2013","extern":"1","author":[{"last_name":"Rügner","full_name":"Rügner, Katja","first_name":"Katja"},{"full_name":"Reuter, Rüdiger","last_name":"Reuter","first_name":"Rüdiger"},{"full_name":"Ellerweg, Dirk","last_name":"Ellerweg","first_name":"Dirk"},{"first_name":"Maria Teresa","id":"54556","last_name":"de los Arcos de Pedro","full_name":"de los Arcos de Pedro, Maria Teresa"},{"first_name":"Achim","full_name":"von Keudell, Achim","last_name":"von Keudell"},{"first_name":"Jan","full_name":"Benedikt, Jan","last_name":"Benedikt"}],"doi":"10.1002/ppap.201300059","page":"1061-1073","type":"journal_article","date_updated":"2023-01-24T08:22:58Z","publication":"Plasma Processes and Polymers","language":[{"iso":"eng"}],"publication_status":"published"}