<?xml version="1.0" encoding="UTF-8"?>

<modsCollection xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns="http://www.loc.gov/mods/v3" xsi:schemaLocation="http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-3.xsd">
<mods version="3.3">

<genre>article</genre>

<titleInfo><title>Transition metal nitride thin films grown by MOCVD using amidinato based complexes [M(NtBu)2{(iPrN)2CMe}2] (M=Mo, W) as precursors</title></titleInfo>


<note type="publicationStatus">published</note>



<name type="personal">
  <namePart type="given">N.B.</namePart>
  <namePart type="family">Srinivasan</namePart>
  <role><roleTerm type="text">author</roleTerm> </role></name>
<name type="personal">
  <namePart type="given">T.B.</namePart>
  <namePart type="family">Thiede</namePart>
  <role><roleTerm type="text">author</roleTerm> </role></name>
<name type="personal">
  <namePart type="given">Maria Teresa</namePart>
  <namePart type="family">de los Arcos de Pedro</namePart>
  <role><roleTerm type="text">author</roleTerm> </role><identifier type="local">54556</identifier></name>
<name type="personal">
  <namePart type="given">V.</namePart>
  <namePart type="family">Gwildies</namePart>
  <role><roleTerm type="text">author</roleTerm> </role></name>
<name type="personal">
  <namePart type="given">M.</namePart>
  <namePart type="family">Krasnopolski</namePart>
  <role><roleTerm type="text">author</roleTerm> </role></name>
<name type="personal">
  <namePart type="given">H.-W.</namePart>
  <namePart type="family">Becker</namePart>
  <role><roleTerm type="text">author</roleTerm> </role></name>
<name type="personal">
  <namePart type="given">D.</namePart>
  <namePart type="family">Rogalla</namePart>
  <role><roleTerm type="text">author</roleTerm> </role></name>
<name type="personal">
  <namePart type="given">A.</namePart>
  <namePart type="family">Devi</namePart>
  <role><roleTerm type="text">author</roleTerm> </role></name>
<name type="personal">
  <namePart type="given">R.A.</namePart>
  <namePart type="family">Fischer</namePart>
  <role><roleTerm type="text">author</roleTerm> </role></name>







<name type="corporate">
  <namePart></namePart>
  <identifier type="local">302</identifier>
  <role>
    <roleTerm type="text">department</roleTerm>
  </role>
</name>









<originInfo><dateIssued encoding="w3cdtf">2013</dateIssued>
</originInfo>
<language><languageTerm authority="iso639-2b" type="code">eng</languageTerm>
</language>



<relatedItem type="host"><titleInfo><title>Surface and Coatings Technology</title></titleInfo>
  <identifier type="issn">0257-8972</identifier><identifier type="doi">10.1016/j.surfcoat.2013.06.024</identifier>
<part><extent unit="pages">130-136</extent>
</part>
</relatedItem>

<note type="extern">yes</note>
<extension>
<bibliographicCitation>
<apa>Srinivasan, N. B., Thiede, T. B., de los Arcos de Pedro, M. T., Gwildies, V., Krasnopolski, M., Becker, H.-W., Rogalla, D., Devi, A., &amp;#38; Fischer, R. A. (2013). Transition metal nitride thin films grown by MOCVD using amidinato based complexes [M(NtBu)2{(iPrN)2CMe}2] (M=Mo, W) as precursors. &lt;i&gt;Surface and Coatings Technology&lt;/i&gt;, 130–136. &lt;a href=&quot;https://doi.org/10.1016/j.surfcoat.2013.06.024&quot;&gt;https://doi.org/10.1016/j.surfcoat.2013.06.024&lt;/a&gt;</apa>
<ieee>N. B. Srinivasan &lt;i&gt;et al.&lt;/i&gt;, “Transition metal nitride thin films grown by MOCVD using amidinato based complexes [M(NtBu)2{(iPrN)2CMe}2] (M=Mo, W) as precursors,” &lt;i&gt;Surface and Coatings Technology&lt;/i&gt;, pp. 130–136, 2013, doi: &lt;a href=&quot;https://doi.org/10.1016/j.surfcoat.2013.06.024&quot;&gt;10.1016/j.surfcoat.2013.06.024&lt;/a&gt;.</ieee>
<short>N.B. Srinivasan, T.B. Thiede, M.T. de los Arcos de Pedro, V. Gwildies, M. Krasnopolski, H.-W. Becker, D. Rogalla, A. Devi, R.A. Fischer, Surface and Coatings Technology (2013) 130–136.</short>
<chicago>Srinivasan, N.B., T.B. Thiede, Maria Teresa de los Arcos de Pedro, V. Gwildies, M. Krasnopolski, H.-W. Becker, D. Rogalla, A. Devi, and R.A. Fischer. “Transition Metal Nitride Thin Films Grown by MOCVD Using Amidinato Based Complexes [M(NtBu)2{(IPrN)2CMe}2] (M=Mo, W) as Precursors.” &lt;i&gt;Surface and Coatings Technology&lt;/i&gt;, 2013, 130–36. &lt;a href=&quot;https://doi.org/10.1016/j.surfcoat.2013.06.024&quot;&gt;https://doi.org/10.1016/j.surfcoat.2013.06.024&lt;/a&gt;.</chicago>
<mla>Srinivasan, N. B., et al. “Transition Metal Nitride Thin Films Grown by MOCVD Using Amidinato Based Complexes [M(NtBu)2{(IPrN)2CMe}2] (M=Mo, W) as Precursors.” &lt;i&gt;Surface and Coatings Technology&lt;/i&gt;, 2013, pp. 130–36, doi:&lt;a href=&quot;https://doi.org/10.1016/j.surfcoat.2013.06.024&quot;&gt;10.1016/j.surfcoat.2013.06.024&lt;/a&gt;.</mla>
<ama>Srinivasan NB, Thiede TB, de los Arcos de Pedro MT, et al. Transition metal nitride thin films grown by MOCVD using amidinato based complexes [M(NtBu)2{(iPrN)2CMe}2] (M=Mo, W) as precursors. &lt;i&gt;Surface and Coatings Technology&lt;/i&gt;. Published online 2013:130-136. doi:&lt;a href=&quot;https://doi.org/10.1016/j.surfcoat.2013.06.024&quot;&gt;10.1016/j.surfcoat.2013.06.024&lt;/a&gt;</ama>
<bibtex>@article{Srinivasan_Thiede_de los Arcos de Pedro_Gwildies_Krasnopolski_Becker_Rogalla_Devi_Fischer_2013, title={Transition metal nitride thin films grown by MOCVD using amidinato based complexes [M(NtBu)2{(iPrN)2CMe}2] (M=Mo, W) as precursors}, DOI={&lt;a href=&quot;https://doi.org/10.1016/j.surfcoat.2013.06.024&quot;&gt;10.1016/j.surfcoat.2013.06.024&lt;/a&gt;}, journal={Surface and Coatings Technology}, author={Srinivasan, N.B. and Thiede, T.B. and de los Arcos de Pedro, Maria Teresa and Gwildies, V. and Krasnopolski, M. and Becker, H.-W. and Rogalla, D. and Devi, A. and Fischer, R.A.}, year={2013}, pages={130–136} }</bibtex>
</bibliographicCitation>
</extension>
<recordInfo><recordIdentifier>22593</recordIdentifier><recordCreationDate encoding="w3cdtf">2021-07-07T11:13:33Z</recordCreationDate><recordChangeDate encoding="w3cdtf">2023-01-24T08:23:13Z</recordChangeDate>
</recordInfo>
</mods>
</modsCollection>
