{"status":"public","article_number":"3939","date_created":"2021-07-07T11:14:22Z","citation":{"chicago":"Xu, Ke, Ayan Roy Chaudhuri, Harish Parala, Dominik Schwendt, Maria Teresa de los Arcos de Pedro, H. Jörg Osten, and Anjana Devi. “Atomic Layer Deposition of Er2O3 Thin Films from Er Tris-Guanidinate and Water: Process Optimization, Film Analysis and Electrical Properties.” <i>Journal of Materials Chemistry C</i>, 2013. <a href=\"https://doi.org/10.1039/c3tc30401a\">https://doi.org/10.1039/c3tc30401a</a>.","mla":"Xu, Ke, et al. “Atomic Layer Deposition of Er2O3 Thin Films from Er Tris-Guanidinate and Water: Process Optimization, Film Analysis and Electrical Properties.” <i>Journal of Materials Chemistry C</i>, 3939, 2013, doi:<a href=\"https://doi.org/10.1039/c3tc30401a\">10.1039/c3tc30401a</a>.","ieee":"K. Xu <i>et al.</i>, “Atomic layer deposition of Er2O3 thin films from Er tris-guanidinate and water: process optimization, film analysis and electrical properties,” <i>Journal of Materials Chemistry C</i>, Art. no. 3939, 2013, doi: <a href=\"https://doi.org/10.1039/c3tc30401a\">10.1039/c3tc30401a</a>.","short":"K. Xu, A.R. Chaudhuri, H. Parala, D. Schwendt, M.T. de los Arcos de Pedro, H.J. Osten, A. Devi, Journal of Materials Chemistry C (2013).","bibtex":"@article{Xu_Chaudhuri_Parala_Schwendt_de los Arcos de Pedro_Osten_Devi_2013, title={Atomic layer deposition of Er2O3 thin films from Er tris-guanidinate and water: process optimization, film analysis and electrical properties}, DOI={<a href=\"https://doi.org/10.1039/c3tc30401a\">10.1039/c3tc30401a</a>}, number={3939}, journal={Journal of Materials Chemistry C}, author={Xu, Ke and Chaudhuri, Ayan Roy and Parala, Harish and Schwendt, Dominik and de los Arcos de Pedro, Maria Teresa and Osten, H. Jörg and Devi, Anjana}, year={2013} }","apa":"Xu, K., Chaudhuri, A. R., Parala, H., Schwendt, D., de los Arcos de Pedro, M. T., Osten, H. J., &#38; Devi, A. (2013). Atomic layer deposition of Er2O3 thin films from Er tris-guanidinate and water: process optimization, film analysis and electrical properties. <i>Journal of Materials Chemistry C</i>, Article 3939. <a href=\"https://doi.org/10.1039/c3tc30401a\">https://doi.org/10.1039/c3tc30401a</a>","ama":"Xu K, Chaudhuri AR, Parala H, et al. Atomic layer deposition of Er2O3 thin films from Er tris-guanidinate and water: process optimization, film analysis and electrical properties. <i>Journal of Materials Chemistry C</i>. Published online 2013. doi:<a href=\"https://doi.org/10.1039/c3tc30401a\">10.1039/c3tc30401a</a>"},"publication_status":"published","author":[{"full_name":"Xu, Ke","first_name":"Ke","last_name":"Xu"},{"last_name":"Chaudhuri","first_name":"Ayan Roy","full_name":"Chaudhuri, Ayan Roy"},{"first_name":"Harish","full_name":"Parala, Harish","last_name":"Parala"},{"last_name":"Schwendt","full_name":"Schwendt, Dominik","first_name":"Dominik"},{"last_name":"de los Arcos de Pedro","id":"54556","first_name":"Maria Teresa","full_name":"de los Arcos de Pedro, Maria Teresa"},{"last_name":"Osten","full_name":"Osten, H. Jörg","first_name":"H. Jörg"},{"full_name":"Devi, Anjana","first_name":"Anjana","last_name":"Devi"}],"publication":"Journal of Materials Chemistry C","user_id":"54556","type":"journal_article","_id":"22596","publication_identifier":{"issn":["2050-7526","2050-7534"]},"doi":"10.1039/c3tc30401a","language":[{"iso":"eng"}],"year":"2013","extern":"1","date_updated":"2023-01-24T08:24:04Z","title":"Atomic layer deposition of Er2O3 thin films from Er tris-guanidinate and water: process optimization, film analysis and electrical properties","department":[{"_id":"302"}]}