@article{22597,
  author       = {{Banerjee, Manish and Srinivasan, Nagendra Babu and Zhu, Huaizhi and Kim, Sun Ja and Xu, Ke and Winter, Manuela and Becker, Hans-Werner and Rogalla, Detlef and de los Arcos de Pedro, Maria Teresa and Bekermann, Daniela and Barreca, Davide and Fischer, Roland A. and Devi, Anjana}},
  issn         = {{1528-7483}},
  journal      = {{Crystal Growth & Design}},
  pages        = {{5079--5089}},
  title        = {{{Fabrication of ZrO2 and ZrN Films by Metalorganic Chemical Vapor Deposition Employing New Zr Precursors}}},
  doi          = {{10.1021/cg3010147}},
  year         = {{2012}},
}

