Fabrication of ZrO2 and ZrN Films by Metalorganic Chemical Vapor Deposition Employing New Zr Precursors Banerjee, Manish Srinivasan, Nagendra Babu Zhu, Huaizhi Kim, Sun Ja Xu, Ke Winter, Manuela Becker, Hans-Werner Rogalla, Detlef de los Arcos de Pedro, Maria Teresa Bekermann, Daniela Barreca, Davide Fischer, Roland A. Devi, Anjana 2012 info:eu-repo/semantics/article doc-type:article text http://purl.org/coar/resource_type/c_6501 https://ris.uni-paderborn.de/record/22597 Banerjee M, Srinivasan NB, Zhu H, et al. Fabrication of ZrO2 and ZrN Films by Metalorganic Chemical Vapor Deposition Employing New Zr Precursors. <i>Crystal Growth &#38; Design</i>. Published online 2012:5079-5089. doi:<a href="https://doi.org/10.1021/cg3010147">10.1021/cg3010147</a> eng info:eu-repo/semantics/altIdentifier/doi/10.1021/cg3010147 info:eu-repo/semantics/altIdentifier/issn/1528-7483 info:eu-repo/semantics/altIdentifier/issn/1528-7505 info:eu-repo/semantics/closedAccess