Fabrication of ZrO2 and ZrN Films by Metalorganic Chemical Vapor Deposition Employing New Zr Precursors
M. Banerjee, N.B. Srinivasan, H. Zhu, S.J. Kim, K. Xu, M. Winter, H.-W. Becker, D. Rogalla, M.T. de los Arcos de Pedro, D. Bekermann, D. Barreca, R.A. Fischer, A. Devi, Crystal Growth &; Design (2012) 5079–5089.