---
_id: '22597'
author:
- first_name: Manish
  full_name: Banerjee, Manish
  last_name: Banerjee
- first_name: Nagendra Babu
  full_name: Srinivasan, Nagendra Babu
  last_name: Srinivasan
- first_name: Huaizhi
  full_name: Zhu, Huaizhi
  last_name: Zhu
- first_name: Sun Ja
  full_name: Kim, Sun Ja
  last_name: Kim
- first_name: Ke
  full_name: Xu, Ke
  last_name: Xu
- first_name: Manuela
  full_name: Winter, Manuela
  last_name: Winter
- first_name: Hans-Werner
  full_name: Becker, Hans-Werner
  last_name: Becker
- first_name: Detlef
  full_name: Rogalla, Detlef
  last_name: Rogalla
- first_name: Maria Teresa
  full_name: de los Arcos de Pedro, Maria Teresa
  id: '54556'
  last_name: de los Arcos de Pedro
- first_name: Daniela
  full_name: Bekermann, Daniela
  last_name: Bekermann
- first_name: Davide
  full_name: Barreca, Davide
  last_name: Barreca
- first_name: Roland A.
  full_name: Fischer, Roland A.
  last_name: Fischer
- first_name: Anjana
  full_name: Devi, Anjana
  last_name: Devi
citation:
  ama: Banerjee M, Srinivasan NB, Zhu H, et al. Fabrication of ZrO2 and ZrN Films
    by Metalorganic Chemical Vapor Deposition Employing New Zr Precursors. <i>Crystal
    Growth &#38; Design</i>. Published online 2012:5079-5089. doi:<a href="https://doi.org/10.1021/cg3010147">10.1021/cg3010147</a>
  apa: Banerjee, M., Srinivasan, N. B., Zhu, H., Kim, S. J., Xu, K., Winter, M., Becker,
    H.-W., Rogalla, D., de los Arcos de Pedro, M. T., Bekermann, D., Barreca, D.,
    Fischer, R. A., &#38; Devi, A. (2012). Fabrication of ZrO2 and ZrN Films by Metalorganic
    Chemical Vapor Deposition Employing New Zr Precursors. <i>Crystal Growth &#38;
    Design</i>, 5079–5089. <a href="https://doi.org/10.1021/cg3010147">https://doi.org/10.1021/cg3010147</a>
  bibtex: '@article{Banerjee_Srinivasan_Zhu_Kim_Xu_Winter_Becker_Rogalla_de los Arcos
    de Pedro_Bekermann_et al._2012, title={Fabrication of ZrO2 and ZrN Films by Metalorganic
    Chemical Vapor Deposition Employing New Zr Precursors}, DOI={<a href="https://doi.org/10.1021/cg3010147">10.1021/cg3010147</a>},
    journal={Crystal Growth &#38; Design}, author={Banerjee, Manish and Srinivasan,
    Nagendra Babu and Zhu, Huaizhi and Kim, Sun Ja and Xu, Ke and Winter, Manuela
    and Becker, Hans-Werner and Rogalla, Detlef and de los Arcos de Pedro, Maria Teresa
    and Bekermann, Daniela and et al.}, year={2012}, pages={5079–5089} }'
  chicago: Banerjee, Manish, Nagendra Babu Srinivasan, Huaizhi Zhu, Sun Ja Kim, Ke
    Xu, Manuela Winter, Hans-Werner Becker, et al. “Fabrication of ZrO2 and ZrN Films
    by Metalorganic Chemical Vapor Deposition Employing New Zr Precursors.” <i>Crystal
    Growth &#38; Design</i>, 2012, 5079–89. <a href="https://doi.org/10.1021/cg3010147">https://doi.org/10.1021/cg3010147</a>.
  ieee: 'M. Banerjee <i>et al.</i>, “Fabrication of ZrO2 and ZrN Films by Metalorganic
    Chemical Vapor Deposition Employing New Zr Precursors,” <i>Crystal Growth &#38;
    Design</i>, pp. 5079–5089, 2012, doi: <a href="https://doi.org/10.1021/cg3010147">10.1021/cg3010147</a>.'
  mla: Banerjee, Manish, et al. “Fabrication of ZrO2 and ZrN Films by Metalorganic
    Chemical Vapor Deposition Employing New Zr Precursors.” <i>Crystal Growth &#38;
    Design</i>, 2012, pp. 5079–89, doi:<a href="https://doi.org/10.1021/cg3010147">10.1021/cg3010147</a>.
  short: M. Banerjee, N.B. Srinivasan, H. Zhu, S.J. Kim, K. Xu, M. Winter, H.-W. Becker,
    D. Rogalla, M.T. de los Arcos de Pedro, D. Bekermann, D. Barreca, R.A. Fischer,
    A. Devi, Crystal Growth &#38; Design (2012) 5079–5089.
date_created: 2021-07-07T11:14:37Z
date_updated: 2023-01-24T08:24:20Z
department:
- _id: '302'
doi: 10.1021/cg3010147
extern: '1'
language:
- iso: eng
page: 5079-5089
publication: Crystal Growth & Design
publication_identifier:
  issn:
  - 1528-7483
  - 1528-7505
publication_status: published
status: public
title: Fabrication of ZrO2 and ZrN Films by Metalorganic Chemical Vapor Deposition
  Employing New Zr Precursors
type: journal_article
user_id: '54556'
year: '2012'
...