SO3, EO3, and O3 thin films by MOCVD from volatile guanidinate class of rare-earth precursors
A.P. Milanov, K. Xu, S. Cwik, H. Parala, M.T. de los Arcos de Pedro, H.-W. Becker, D. Rogalla, R. Cross, S. Paul, A. Devi, Dalton Transactions (2012).