---
_id: '22604'
author:
- first_name: Rüdiger
  full_name: Reuter, Rüdiger
  last_name: Reuter
- first_name: Katja
  full_name: Rügner, Katja
  last_name: Rügner
- first_name: Dirk
  full_name: Ellerweg, Dirk
  last_name: Ellerweg
- first_name: Maria Teresa
  full_name: de los Arcos de Pedro, Maria Teresa
  id: '54556'
  last_name: de los Arcos de Pedro
- first_name: Achim
  full_name: von Keudell, Achim
  last_name: von Keudell
- first_name: Jan
  full_name: Benedikt, Jan
  last_name: Benedikt
citation:
  ama: Reuter R, Rügner K, Ellerweg D, de los Arcos de Pedro MT, von Keudell A, Benedikt
    J. The Role of Oxygen and Surface Reactions in the Deposition of Silicon Oxide
    like Films from HMDSO at Atmospheric Pressure. <i>Plasma Processes and Polymers</i>.
    Published online 2012:1116-1124. doi:<a href="https://doi.org/10.1002/ppap.201100146">10.1002/ppap.201100146</a>
  apa: Reuter, R., Rügner, K., Ellerweg, D., de los Arcos de Pedro, M. T., von Keudell,
    A., &#38; Benedikt, J. (2012). The Role of Oxygen and Surface Reactions in the
    Deposition of Silicon Oxide like Films from HMDSO at Atmospheric Pressure. <i>Plasma
    Processes and Polymers</i>, 1116–1124. <a href="https://doi.org/10.1002/ppap.201100146">https://doi.org/10.1002/ppap.201100146</a>
  bibtex: '@article{Reuter_Rügner_Ellerweg_de los Arcos de Pedro_von Keudell_Benedikt_2012,
    title={The Role of Oxygen and Surface Reactions in the Deposition of Silicon Oxide
    like Films from HMDSO at Atmospheric Pressure}, DOI={<a href="https://doi.org/10.1002/ppap.201100146">10.1002/ppap.201100146</a>},
    journal={Plasma Processes and Polymers}, author={Reuter, Rüdiger and Rügner, Katja
    and Ellerweg, Dirk and de los Arcos de Pedro, Maria Teresa and von Keudell, Achim
    and Benedikt, Jan}, year={2012}, pages={1116–1124} }'
  chicago: Reuter, Rüdiger, Katja Rügner, Dirk Ellerweg, Maria Teresa de los Arcos
    de Pedro, Achim von Keudell, and Jan Benedikt. “The Role of Oxygen and Surface
    Reactions in the Deposition of Silicon Oxide like Films from HMDSO at Atmospheric
    Pressure.” <i>Plasma Processes and Polymers</i>, 2012, 1116–24. <a href="https://doi.org/10.1002/ppap.201100146">https://doi.org/10.1002/ppap.201100146</a>.
  ieee: 'R. Reuter, K. Rügner, D. Ellerweg, M. T. de los Arcos de Pedro, A. von Keudell,
    and J. Benedikt, “The Role of Oxygen and Surface Reactions in the Deposition of
    Silicon Oxide like Films from HMDSO at Atmospheric Pressure,” <i>Plasma Processes
    and Polymers</i>, pp. 1116–1124, 2012, doi: <a href="https://doi.org/10.1002/ppap.201100146">10.1002/ppap.201100146</a>.'
  mla: Reuter, Rüdiger, et al. “The Role of Oxygen and Surface Reactions in the Deposition
    of Silicon Oxide like Films from HMDSO at Atmospheric Pressure.” <i>Plasma Processes
    and Polymers</i>, 2012, pp. 1116–24, doi:<a href="https://doi.org/10.1002/ppap.201100146">10.1002/ppap.201100146</a>.
  short: R. Reuter, K. Rügner, D. Ellerweg, M.T. de los Arcos de Pedro, A. von Keudell,
    J. Benedikt, Plasma Processes and Polymers (2012) 1116–1124.
date_created: 2021-07-07T11:30:59Z
date_updated: 2023-01-24T08:26:12Z
department:
- _id: '302'
doi: 10.1002/ppap.201100146
extern: '1'
language:
- iso: eng
page: 1116-1124
publication: Plasma Processes and Polymers
publication_identifier:
  issn:
  - 1612-8850
publication_status: published
status: public
title: The Role of Oxygen and Surface Reactions in the Deposition of Silicon Oxide
  like Films from HMDSO at Atmospheric Pressure
type: journal_article
user_id: '54556'
year: '2012'
...