{"abstract":[{"text":"<jats:title>Abstract</jats:title>\r\n               <jats:p>We demonstrate the fabrication of micron-wide tungsten silicide superconducting nanowire single-photon detectors on a silicon substrate using laser lithography. We show saturated internal detection efficiencies with wire widths ranging from 0.59 <jats:italic>µ</jats:italic>m to 1.43 <jats:italic>µ</jats:italic>m under illumination at 1550 nm. We demonstrate both straight wires, as well as meandered structures. Single-photon sensitivity is shown in devices up to 4 mm in length. Laser-lithographically written devices allow for fast and easy structuring of large areas while maintaining a saturated internal efficiency for wire widths around 1 <jats:italic>µ</jats:italic>m.</jats:p>","lang":"eng"}],"keyword":["Materials Chemistry","Electrical and Electronic Engineering","Metals and Alloys","Condensed Matter Physics","Ceramics and Composites"],"date_created":"2022-10-11T07:14:11Z","publication_status":"published","issue":"5","doi":"10.1088/1361-6668/ac5338","article_number":"055005","year":"2022","status":"public","intvolume":"        35","author":[{"first_name":"Maximilian","full_name":"Protte, Maximilian","id":"46170","last_name":"Protte"},{"first_name":"Varun B","full_name":"Verma, Varun B","last_name":"Verma"},{"last_name":"Höpker","id":"33913","full_name":"Höpker, Jan Philipp","first_name":"Jan Philipp"},{"first_name":"Richard P","last_name":"Mirin","full_name":"Mirin, Richard P"},{"full_name":"Woo Nam, Sae","last_name":"Woo Nam","first_name":"Sae"},{"first_name":"Tim","last_name":"Bartley","id":"49683","full_name":"Bartley, Tim"}],"publisher":"IOP Publishing","volume":35,"title":"Laser-lithographically written micron-wide superconducting nanowire single-photon detectors","_id":"33671","publication_identifier":{"issn":["0953-2048","1361-6668"]},"department":[{"_id":"15"},{"_id":"230"},{"_id":"623"}],"user_id":"33913","citation":{"mla":"Protte, Maximilian, et al. “Laser-Lithographically Written Micron-Wide Superconducting Nanowire Single-Photon Detectors.” <i>Superconductor Science and Technology</i>, vol. 35, no. 5, 055005, IOP Publishing, 2022, doi:<a href=\"https://doi.org/10.1088/1361-6668/ac5338\">10.1088/1361-6668/ac5338</a>.","ama":"Protte M, Verma VB, Höpker JP, Mirin RP, Woo Nam S, Bartley T. Laser-lithographically written micron-wide superconducting nanowire single-photon detectors. <i>Superconductor Science and Technology</i>. 2022;35(5). doi:<a href=\"https://doi.org/10.1088/1361-6668/ac5338\">10.1088/1361-6668/ac5338</a>","ieee":"M. Protte, V. B. Verma, J. P. Höpker, R. P. Mirin, S. Woo Nam, and T. Bartley, “Laser-lithographically written micron-wide superconducting nanowire single-photon detectors,” <i>Superconductor Science and Technology</i>, vol. 35, no. 5, Art. no. 055005, 2022, doi: <a href=\"https://doi.org/10.1088/1361-6668/ac5338\">10.1088/1361-6668/ac5338</a>.","apa":"Protte, M., Verma, V. B., Höpker, J. P., Mirin, R. P., Woo Nam, S., &#38; Bartley, T. (2022). Laser-lithographically written micron-wide superconducting nanowire single-photon detectors. <i>Superconductor Science and Technology</i>, <i>35</i>(5), Article 055005. <a href=\"https://doi.org/10.1088/1361-6668/ac5338\">https://doi.org/10.1088/1361-6668/ac5338</a>","bibtex":"@article{Protte_Verma_Höpker_Mirin_Woo Nam_Bartley_2022, title={Laser-lithographically written micron-wide superconducting nanowire single-photon detectors}, volume={35}, DOI={<a href=\"https://doi.org/10.1088/1361-6668/ac5338\">10.1088/1361-6668/ac5338</a>}, number={5055005}, journal={Superconductor Science and Technology}, publisher={IOP Publishing}, author={Protte, Maximilian and Verma, Varun B and Höpker, Jan Philipp and Mirin, Richard P and Woo Nam, Sae and Bartley, Tim}, year={2022} }","short":"M. Protte, V.B. Verma, J.P. Höpker, R.P. Mirin, S. Woo Nam, T. Bartley, Superconductor Science and Technology 35 (2022).","chicago":"Protte, Maximilian, Varun B Verma, Jan Philipp Höpker, Richard P Mirin, Sae Woo Nam, and Tim Bartley. “Laser-Lithographically Written Micron-Wide Superconducting Nanowire Single-Photon Detectors.” <i>Superconductor Science and Technology</i> 35, no. 5 (2022). <a href=\"https://doi.org/10.1088/1361-6668/ac5338\">https://doi.org/10.1088/1361-6668/ac5338</a>."},"language":[{"iso":"eng"}],"type":"journal_article","date_updated":"2023-01-12T13:02:52Z","publication":"Superconductor Science and Technology"}