@article{34086, author = {{Bürger, Julius and Venugopal, Harikrishnan and Kool, Daniel and de los Arcos de Pedro, Maria Teresa and Gonzalez Orive, Alejandro and Grundmeier, Guido and Brassat, Katharina and Lindner, Jörg}}, issn = {{2196-7350}}, journal = {{Advanced Materials Interfaces}}, keywords = {{General Medicine}}, number = {{26}}, publisher = {{Wiley}}, title = {{{High‐Resolution Study of Changes in Morphology and Chemistry of Cylindrical PS‐ b ‐PMMA Block Copolymer Nanomasks during Mask Development}}}, doi = {{10.1002/admi.202200962}}, volume = {{9}}, year = {{2022}}, }