---
res:
  bibo_abstract:
  - <jats:p>Block copolymer (BCP) self-assembly is a promising tool for next generation
    lithography as microphase separated polymer domains in thin films can act as templates
    for surface nanopatterning with sub-20 nm features. The replicated patterns can,
    however, only be as precise as their templates. Thus, the investigation of the
    morphology of polymer domains is of great importance. Commonly used analytical
    techniques (neutron scattering, scanning force microscopy) either lack spatial
    information or nanoscale resolution. Using advanced analytical (scanning) transmission
    electron microscopy ((S)TEM), we provide real space information on polymer domain
    morphology and interfaces between polystyrene (PS) and polymethylmethacrylate
    (PMMA) in cylinder- and lamellae-forming BCPs at highest resolution. This allows
    us to correlate the internal structure of polymer domains with line edge roughnesses,
    interface widths and domain sizes. STEM is employed for high-resolution imaging,
    electron energy loss spectroscopy and energy filtered TEM (EFTEM) spectroscopic
    imaging for material identification and EFTEM thickness mapping for visualisation
    of material densities at defects. The volume fraction of non-phase separated polymer
    species can be analysed by EFTEM. These methods give new insights into the morphology
    of polymer domains the exact knowledge of which will allow to improve pattern
    quality for nanolithography.</jats:p>@eng
  bibo_authorlist:
  - foaf_Person:
      foaf_givenName: Julius
      foaf_name: Bürger, Julius
      foaf_surname: Bürger
      foaf_workInfoHomepage: http://www.librecat.org/personId=46952
  - foaf_Person:
      foaf_givenName: Vinay
      foaf_name: Kunnathully, Vinay
      foaf_surname: Kunnathully
  - foaf_Person:
      foaf_givenName: Daniel
      foaf_name: Kool, Daniel
      foaf_surname: Kool
      foaf_workInfoHomepage: http://www.librecat.org/personId=44586
  - foaf_Person:
      foaf_givenName: Jörg
      foaf_name: Lindner, Jörg
      foaf_surname: Lindner
      foaf_workInfoHomepage: http://www.librecat.org/personId=20797
  - foaf_Person:
      foaf_givenName: Katharina
      foaf_name: Brassat, Katharina
      foaf_surname: Brassat
      foaf_workInfoHomepage: http://www.librecat.org/personId=11305
  bibo_doi: 10.3390/nano10010141
  bibo_issue: '1'
  bibo_volume: 10
  dct_date: 2020^xs_gYear
  dct_isPartOf:
  - http://id.crossref.org/issn/2079-4991
  dct_language: eng
  dct_publisher: MDPI AG@
  dct_subject:
  - General Materials Science
  - General Chemical Engineering
  dct_title: Characterisation of the PS-PMMA Interfaces in Microphase Separated Block
    Copolymer Thin Films by Analytical (S)TEM@
...