---
_id: '34092'
abstract:
- lang: eng
  text: <jats:p>Block copolymer (BCP) self-assembly is a promising tool for next generation
    lithography as microphase separated polymer domains in thin films can act as templates
    for surface nanopatterning with sub-20 nm features. The replicated patterns can,
    however, only be as precise as their templates. Thus, the investigation of the
    morphology of polymer domains is of great importance. Commonly used analytical
    techniques (neutron scattering, scanning force microscopy) either lack spatial
    information or nanoscale resolution. Using advanced analytical (scanning) transmission
    electron microscopy ((S)TEM), we provide real space information on polymer domain
    morphology and interfaces between polystyrene (PS) and polymethylmethacrylate
    (PMMA) in cylinder- and lamellae-forming BCPs at highest resolution. This allows
    us to correlate the internal structure of polymer domains with line edge roughnesses,
    interface widths and domain sizes. STEM is employed for high-resolution imaging,
    electron energy loss spectroscopy and energy filtered TEM (EFTEM) spectroscopic
    imaging for material identification and EFTEM thickness mapping for visualisation
    of material densities at defects. The volume fraction of non-phase separated polymer
    species can be analysed by EFTEM. These methods give new insights into the morphology
    of polymer domains the exact knowledge of which will allow to improve pattern
    quality for nanolithography.</jats:p>
article_number: '141'
author:
- first_name: Julius
  full_name: Bürger, Julius
  id: '46952'
  last_name: Bürger
- first_name: Vinay
  full_name: Kunnathully, Vinay
  last_name: Kunnathully
- first_name: Daniel
  full_name: Kool, Daniel
  id: '44586'
  last_name: Kool
- first_name: Jörg
  full_name: Lindner, Jörg
  id: '20797'
  last_name: Lindner
- first_name: Katharina
  full_name: Brassat, Katharina
  id: '11305'
  last_name: Brassat
citation:
  ama: Bürger J, Kunnathully V, Kool D, Lindner J, Brassat K. Characterisation of
    the PS-PMMA Interfaces in Microphase Separated Block Copolymer Thin Films by Analytical
    (S)TEM. <i>Nanomaterials</i>. 2020;10(1). doi:<a href="https://doi.org/10.3390/nano10010141">10.3390/nano10010141</a>
  apa: Bürger, J., Kunnathully, V., Kool, D., Lindner, J., &#38; Brassat, K. (2020).
    Characterisation of the PS-PMMA Interfaces in Microphase Separated Block Copolymer
    Thin Films by Analytical (S)TEM. <i>Nanomaterials</i>, <i>10</i>(1), Article 141.
    <a href="https://doi.org/10.3390/nano10010141">https://doi.org/10.3390/nano10010141</a>
  bibtex: '@article{Bürger_Kunnathully_Kool_Lindner_Brassat_2020, title={Characterisation
    of the PS-PMMA Interfaces in Microphase Separated Block Copolymer Thin Films by
    Analytical (S)TEM}, volume={10}, DOI={<a href="https://doi.org/10.3390/nano10010141">10.3390/nano10010141</a>},
    number={1141}, journal={Nanomaterials}, publisher={MDPI AG}, author={Bürger, Julius
    and Kunnathully, Vinay and Kool, Daniel and Lindner, Jörg and Brassat, Katharina},
    year={2020} }'
  chicago: Bürger, Julius, Vinay Kunnathully, Daniel Kool, Jörg Lindner, and Katharina
    Brassat. “Characterisation of the PS-PMMA Interfaces in Microphase Separated Block
    Copolymer Thin Films by Analytical (S)TEM.” <i>Nanomaterials</i> 10, no. 1 (2020).
    <a href="https://doi.org/10.3390/nano10010141">https://doi.org/10.3390/nano10010141</a>.
  ieee: 'J. Bürger, V. Kunnathully, D. Kool, J. Lindner, and K. Brassat, “Characterisation
    of the PS-PMMA Interfaces in Microphase Separated Block Copolymer Thin Films by
    Analytical (S)TEM,” <i>Nanomaterials</i>, vol. 10, no. 1, Art. no. 141, 2020,
    doi: <a href="https://doi.org/10.3390/nano10010141">10.3390/nano10010141</a>.'
  mla: Bürger, Julius, et al. “Characterisation of the PS-PMMA Interfaces in Microphase
    Separated Block Copolymer Thin Films by Analytical (S)TEM.” <i>Nanomaterials</i>,
    vol. 10, no. 1, 141, MDPI AG, 2020, doi:<a href="https://doi.org/10.3390/nano10010141">10.3390/nano10010141</a>.
  short: J. Bürger, V. Kunnathully, D. Kool, J. Lindner, K. Brassat, Nanomaterials
    10 (2020).
date_created: 2022-11-15T14:20:33Z
date_updated: 2023-01-10T12:11:57Z
department:
- _id: '15'
- _id: '230'
doi: 10.3390/nano10010141
intvolume: '        10'
issue: '1'
keyword:
- General Materials Science
- General Chemical Engineering
language:
- iso: eng
publication: Nanomaterials
publication_identifier:
  issn:
  - 2079-4991
publication_status: published
publisher: MDPI AG
status: public
title: Characterisation of the PS-PMMA Interfaces in Microphase Separated Block Copolymer
  Thin Films by Analytical (S)TEM
type: journal_article
user_id: '77496'
volume: 10
year: '2020'
...