@article{34648,
  author       = {{Hoppe, Christian and Mitschker, Felix and Mai, Lukas and Liedke, Maciej Oskar and Arcos, Teresa and Awakowicz, Peter and Devi, Anjana and Attallah, Ahmed Gamal and Butterling, Maik and Wagner, Andreas and Grundmeier, Guido}},
  issn         = {{1612-8850}},
  journal      = {{Plasma Processes and Polymers}},
  keywords     = {{Polymers and Plastics, Condensed Matter Physics}},
  number       = {{4}},
  publisher    = {{Wiley}},
  title        = {{{Influence of surface activation on the microporosity of PE‐CVD and PE‐ALD SiO            <sub>              <i>x</i>            </sub>            thin films on PDMS}}},
  doi          = {{10.1002/ppap.202100174}},
  volume       = {{19}},
  year         = {{2022}},
}