Influence of surface activation on the microporosity of PE‐CVD and PE‐ALD SiO <sub> <i>x</i> </sub> thin films on PDMS Hoppe, Christian Mitschker, Felix Mai, Lukas Liedke, Maciej Oskar Arcos, Teresa Awakowicz, Peter Devi, Anjana Attallah, Ahmed Gamal Butterling, Maik Wagner, Andreas Grundmeier, Guido Polymers and Plastics Condensed Matter Physics Wiley 2022 info:eu-repo/semantics/article doc-type:article text http://purl.org/coar/resource_type/c_6501 https://ris.uni-paderborn.de/record/34648 Hoppe C, Mitschker F, Mai L, et al. Influence of surface activation on the microporosity of PE‐CVD and PE‐ALD SiO            <sub>              <i>x</i>            </sub>            thin films on PDMS. <i>Plasma Processes and Polymers</i>. 2022;19(4). doi:<a href="https://doi.org/10.1002/ppap.202100174">10.1002/ppap.202100174</a> eng info:eu-repo/semantics/altIdentifier/doi/10.1002/ppap.202100174 info:eu-repo/semantics/altIdentifier/issn/1612-8850 info:eu-repo/semantics/altIdentifier/issn/1612-8869 info:eu-repo/semantics/closedAccess