Influence of surface activation on the microporosity of PE‐CVD and PE‐ALD SiO x thin films on PDMS

article Influence of surface activation on the microporosity of PE‐CVD and PE‐ALD SiO x thin films on PDMS published Christian Hoppe author 27401 Felix Mitschker author Lukas Mai author Maciej Oskar Liedke author Teresa Arcos author Peter Awakowicz author Anjana Devi author Ahmed Gamal Attallah author Maik Butterling author Andreas Wagner author Guido Grundmeier author 194 302 department Wiley2022 eng Polymers and PlasticsCondensed Matter Physics Plasma Processes and Polymers 1612-8850 1612-886910.1002/ppap.202100174 194 Hoppe C, Mitschker F, Mai L, et al. Influence of surface activation on the microporosity of PE‐CVD and PE‐ALD SiO x thin films on PDMS. Plasma Processes and Polymers. 2022;19(4). doi:<a href="https://doi.org/10.1002/ppap.202100174">10.1002/ppap.202100174</a> Hoppe, Christian, Felix Mitschker, Lukas Mai, Maciej Oskar Liedke, Teresa Arcos, Peter Awakowicz, Anjana Devi, et al. “Influence of Surface Activation on the Microporosity of PE‐CVD and PE‐ALD SiO x Thin Films on PDMS.” Plasma Processes and Polymers 19, no. 4 (2022). <a href="https://doi.org/10.1002/ppap.202100174">https://doi.org/10.1002/ppap.202100174</a>. C. Hoppe et al., “Influence of surface activation on the microporosity of PE‐CVD and PE‐ALD SiO x thin films on PDMS,” Plasma Processes and Polymers, vol. 19, no. 4, Art. no. 2100174, 2022, doi: <a href="https://doi.org/10.1002/ppap.202100174">10.1002/ppap.202100174</a>. Hoppe, Christian, et al. “Influence of Surface Activation on the Microporosity of PE‐CVD and PE‐ALD SiO x Thin Films on PDMS.” Plasma Processes and Polymers, vol. 19, no. 4, 2100174, Wiley, 2022, doi:<a href="https://doi.org/10.1002/ppap.202100174">10.1002/ppap.202100174</a>. C. Hoppe, F. Mitschker, L. Mai, M.O. Liedke, T. Arcos, P. Awakowicz, A. Devi, A.G. Attallah, M. Butterling, A. Wagner, G. Grundmeier, Plasma Processes and Polymers 19 (2022). @article{Hoppe_Mitschker_Mai_Liedke_Arcos_Awakowicz_Devi_Attallah_Butterling_Wagner_et al._2022, title={Influence of surface activation on the microporosity of PE‐CVD and PE‐ALD SiO x thin films on PDMS}, volume={19}, DOI={<a href="https://doi.org/10.1002/ppap.202100174">10.1002/ppap.202100174</a>}, number={42100174}, journal={Plasma Processes and Polymers}, publisher={Wiley}, author={Hoppe, Christian and Mitschker, Felix and Mai, Lukas and Liedke, Maciej Oskar and Arcos, Teresa and Awakowicz, Peter and Devi, Anjana and Attallah, Ahmed Gamal and Butterling, Maik and Wagner, Andreas and et al.}, year={2022} } Hoppe, C., Mitschker, F., Mai, L., Liedke, M. O., Arcos, T., Awakowicz, P., Devi, A., Attallah, A. G., Butterling, M., Wagner, A., & Grundmeier, G. (2022). Influence of surface activation on the microporosity of PE‐CVD and PE‐ALD SiO x thin films on PDMS. Plasma Processes and Polymers, 19(4), Article 2100174. <a href="https://doi.org/10.1002/ppap.202100174">https://doi.org/10.1002/ppap.202100174</a> 346482022-12-21T09:32:52Z2022-12-21T09:33:14Z