---
_id: '34648'
article_number: '2100174'
author:
- first_name: Christian
  full_name: Hoppe, Christian
  id: '27401'
  last_name: Hoppe
- first_name: Felix
  full_name: Mitschker, Felix
  last_name: Mitschker
- first_name: Lukas
  full_name: Mai, Lukas
  last_name: Mai
- first_name: Maciej Oskar
  full_name: Liedke, Maciej Oskar
  last_name: Liedke
- first_name: Teresa
  full_name: Arcos, Teresa
  last_name: Arcos
- first_name: Peter
  full_name: Awakowicz, Peter
  last_name: Awakowicz
- first_name: Anjana
  full_name: Devi, Anjana
  last_name: Devi
- first_name: Ahmed Gamal
  full_name: Attallah, Ahmed Gamal
  last_name: Attallah
- first_name: Maik
  full_name: Butterling, Maik
  last_name: Butterling
- first_name: Andreas
  full_name: Wagner, Andreas
  last_name: Wagner
- first_name: Guido
  full_name: Grundmeier, Guido
  id: '194'
  last_name: Grundmeier
citation:
  ama: Hoppe C, Mitschker F, Mai L, et al. Influence of surface activation on the
    microporosity of PE‐CVD and PE‐ALD SiO            <sub>              <i>x</i> 
              </sub>            thin films on PDMS. <i>Plasma Processes and Polymers</i>.
    2022;19(4). doi:<a href="https://doi.org/10.1002/ppap.202100174">10.1002/ppap.202100174</a>
  apa: Hoppe, C., Mitschker, F., Mai, L., Liedke, M. O., Arcos, T., Awakowicz, P.,
    Devi, A., Attallah, A. G., Butterling, M., Wagner, A., &#38; Grundmeier, G. (2022).
    Influence of surface activation on the microporosity of PE‐CVD and PE‐ALD SiO 
              <sub>              <i>x</i>            </sub>            thin films
    on PDMS. <i>Plasma Processes and Polymers</i>, <i>19</i>(4), Article 2100174.
    <a href="https://doi.org/10.1002/ppap.202100174">https://doi.org/10.1002/ppap.202100174</a>
  bibtex: '@article{Hoppe_Mitschker_Mai_Liedke_Arcos_Awakowicz_Devi_Attallah_Butterling_Wagner_et
    al._2022, title={Influence of surface activation on the microporosity of PE‐CVD
    and PE‐ALD SiO            <sub>              <i>x</i>            </sub>       
        thin films on PDMS}, volume={19}, DOI={<a href="https://doi.org/10.1002/ppap.202100174">10.1002/ppap.202100174</a>},
    number={42100174}, journal={Plasma Processes and Polymers}, publisher={Wiley},
    author={Hoppe, Christian and Mitschker, Felix and Mai, Lukas and Liedke, Maciej
    Oskar and Arcos, Teresa and Awakowicz, Peter and Devi, Anjana and Attallah, Ahmed
    Gamal and Butterling, Maik and Wagner, Andreas and et al.}, year={2022} }'
  chicago: Hoppe, Christian, Felix Mitschker, Lukas Mai, Maciej Oskar Liedke, Teresa
    Arcos, Peter Awakowicz, Anjana Devi, et al. “Influence of Surface Activation on
    the Microporosity of PE‐CVD and PE‐ALD SiO            <sub>              <i>x</i> 
              </sub>            Thin Films on PDMS.” <i>Plasma Processes and Polymers</i>
    19, no. 4 (2022). <a href="https://doi.org/10.1002/ppap.202100174">https://doi.org/10.1002/ppap.202100174</a>.
  ieee: 'C. Hoppe <i>et al.</i>, “Influence of surface activation on the microporosity
    of PE‐CVD and PE‐ALD SiO            <sub>              <i>x</i>            </sub> 
              thin films on PDMS,” <i>Plasma Processes and Polymers</i>, vol. 19,
    no. 4, Art. no. 2100174, 2022, doi: <a href="https://doi.org/10.1002/ppap.202100174">10.1002/ppap.202100174</a>.'
  mla: Hoppe, Christian, et al. “Influence of Surface Activation on the Microporosity
    of PE‐CVD and PE‐ALD SiO            <sub>              <i>x</i>            </sub> 
              Thin Films on PDMS.” <i>Plasma Processes and Polymers</i>, vol. 19,
    no. 4, 2100174, Wiley, 2022, doi:<a href="https://doi.org/10.1002/ppap.202100174">10.1002/ppap.202100174</a>.
  short: C. Hoppe, F. Mitschker, L. Mai, M.O. Liedke, T. Arcos, P. Awakowicz, A. Devi,
    A.G. Attallah, M. Butterling, A. Wagner, G. Grundmeier, Plasma Processes and Polymers
    19 (2022).
date_created: 2022-12-21T09:32:52Z
date_updated: 2022-12-21T09:33:14Z
department:
- _id: '302'
doi: 10.1002/ppap.202100174
intvolume: '        19'
issue: '4'
keyword:
- Polymers and Plastics
- Condensed Matter Physics
language:
- iso: eng
publication: Plasma Processes and Polymers
publication_identifier:
  issn:
  - 1612-8850
  - 1612-8869
publication_status: published
publisher: Wiley
status: public
title: Influence of surface activation on the microporosity of PE‐CVD and PE‐ALD SiO            <sub>              <i>x</i>            </sub>            thin
  films on PDMS
type: journal_article
user_id: '48864'
volume: 19
year: '2022'
...
