---
res:
  bibo_authorlist:
  - foaf_Person:
      foaf_givenName: Xiaofan
      foaf_name: Xie, Xiaofan
      foaf_surname: Xie
  - foaf_Person:
      foaf_givenName: Teresa
      foaf_name: de los Arcos, Teresa
      foaf_surname: de los Arcos
  - foaf_Person:
      foaf_givenName: Guido
      foaf_name: Grundmeier, Guido
      foaf_surname: Grundmeier
      foaf_workInfoHomepage: http://www.librecat.org/personId=194
  bibo_doi: 10.1002/ppap.202200052
  bibo_issue: '11'
  bibo_volume: 19
  dct_date: 2022^xs_gYear
  dct_isPartOf:
  - http://id.crossref.org/issn/1612-8850
  - http://id.crossref.org/issn/1612-8869
  dct_language: eng
  dct_publisher: Wiley@
  dct_subject:
  - Polymers and Plastics
  - Condensed Matter Physics
  dct_title: Comparative analysis of hexamethyldisiloxane and hexamethyldisilazane
    plasma polymer thin films before and after plasma oxidation@
...