@article{34650,
  author       = {{Xie, Xiaofan and de los Arcos, Teresa and Grundmeier, Guido}},
  issn         = {{1612-8850}},
  journal      = {{Plasma Processes and Polymers}},
  keywords     = {{Polymers and Plastics, Condensed Matter Physics}},
  number       = {{11}},
  publisher    = {{Wiley}},
  title        = {{{Comparative analysis of hexamethyldisiloxane and hexamethyldisilazane plasma polymer thin films before and after plasma oxidation}}},
  doi          = {{10.1002/ppap.202200052}},
  volume       = {{19}},
  year         = {{2022}},
}