{"status":"public","keyword":["Polymers and Plastics","Condensed Matter Physics"],"intvolume":"        19","citation":{"apa":"Xie, X., de los Arcos, T., &#38; Grundmeier, G. (2022). Comparative analysis of hexamethyldisiloxane and hexamethyldisilazane plasma polymer thin films before and after plasma oxidation. <i>Plasma Processes and Polymers</i>, <i>19</i>(11), Article 2200052. <a href=\"https://doi.org/10.1002/ppap.202200052\">https://doi.org/10.1002/ppap.202200052</a>","ama":"Xie X, de los Arcos T, Grundmeier G. Comparative analysis of hexamethyldisiloxane and hexamethyldisilazane plasma polymer thin films before and after plasma oxidation. <i>Plasma Processes and Polymers</i>. 2022;19(11). doi:<a href=\"https://doi.org/10.1002/ppap.202200052\">10.1002/ppap.202200052</a>","bibtex":"@article{Xie_de los Arcos_Grundmeier_2022, title={Comparative analysis of hexamethyldisiloxane and hexamethyldisilazane plasma polymer thin films before and after plasma oxidation}, volume={19}, DOI={<a href=\"https://doi.org/10.1002/ppap.202200052\">10.1002/ppap.202200052</a>}, number={112200052}, journal={Plasma Processes and Polymers}, publisher={Wiley}, author={Xie, Xiaofan and de los Arcos, Teresa and Grundmeier, Guido}, year={2022} }","short":"X. Xie, T. de los Arcos, G. Grundmeier, Plasma Processes and Polymers 19 (2022).","mla":"Xie, Xiaofan, et al. “Comparative Analysis of Hexamethyldisiloxane and Hexamethyldisilazane Plasma Polymer Thin Films before and after Plasma Oxidation.” <i>Plasma Processes and Polymers</i>, vol. 19, no. 11, 2200052, Wiley, 2022, doi:<a href=\"https://doi.org/10.1002/ppap.202200052\">10.1002/ppap.202200052</a>.","ieee":"X. Xie, T. de los Arcos, and G. Grundmeier, “Comparative analysis of hexamethyldisiloxane and hexamethyldisilazane plasma polymer thin films before and after plasma oxidation,” <i>Plasma Processes and Polymers</i>, vol. 19, no. 11, Art. no. 2200052, 2022, doi: <a href=\"https://doi.org/10.1002/ppap.202200052\">10.1002/ppap.202200052</a>.","chicago":"Xie, Xiaofan, Teresa de los Arcos, and Guido Grundmeier. “Comparative Analysis of Hexamethyldisiloxane and Hexamethyldisilazane Plasma Polymer Thin Films before and after Plasma Oxidation.” <i>Plasma Processes and Polymers</i> 19, no. 11 (2022). <a href=\"https://doi.org/10.1002/ppap.202200052\">https://doi.org/10.1002/ppap.202200052</a>."},"date_created":"2022-12-21T09:33:54Z","author":[{"first_name":"Xiaofan","full_name":"Xie, Xiaofan","last_name":"Xie"},{"first_name":"Teresa","full_name":"de los Arcos, Teresa","last_name":"de los Arcos"},{"first_name":"Guido","full_name":"Grundmeier, Guido","last_name":"Grundmeier","id":"194"}],"user_id":"48864","publication":"Plasma Processes and Polymers","type":"journal_article","language":[{"iso":"eng"}],"title":"Comparative analysis of hexamethyldisiloxane and hexamethyldisilazane plasma polymer thin films before and after plasma oxidation","volume":19,"publisher":"Wiley","article_number":"2200052","publication_status":"published","issue":"11","publication_identifier":{"issn":["1612-8850","1612-8869"]},"_id":"34650","doi":"10.1002/ppap.202200052","year":"2022","date_updated":"2022-12-21T09:34:05Z","department":[{"_id":"302"}]}