article Comparative analysis of hexamethyldisiloxane and hexamethyldisilazane plasma polymer thin films before and after plasma oxidation published Xiaofan Xie author Teresa de los Arcos author Guido Grundmeier author 194 302 department Wiley2022 eng Polymers and PlasticsCondensed Matter Physics Plasma Processes and Polymers 1612-8850 1612-886910.1002/ppap.202200052 1911 @article{Xie_de los Arcos_Grundmeier_2022, title={Comparative analysis of hexamethyldisiloxane and hexamethyldisilazane plasma polymer thin films before and after plasma oxidation}, volume={19}, DOI={<a href="https://doi.org/10.1002/ppap.202200052">10.1002/ppap.202200052</a>}, number={112200052}, journal={Plasma Processes and Polymers}, publisher={Wiley}, author={Xie, Xiaofan and de los Arcos, Teresa and Grundmeier, Guido}, year={2022} } X. Xie, T. de los Arcos, G. Grundmeier, Plasma Processes and Polymers 19 (2022). Xie, Xiaofan, et al. “Comparative Analysis of Hexamethyldisiloxane and Hexamethyldisilazane Plasma Polymer Thin Films before and after Plasma Oxidation.” <i>Plasma Processes and Polymers</i>, vol. 19, no. 11, 2200052, Wiley, 2022, doi:<a href="https://doi.org/10.1002/ppap.202200052">10.1002/ppap.202200052</a>. Xie, X., de los Arcos, T., &#38; Grundmeier, G. (2022). Comparative analysis of hexamethyldisiloxane and hexamethyldisilazane plasma polymer thin films before and after plasma oxidation. <i>Plasma Processes and Polymers</i>, <i>19</i>(11), Article 2200052. <a href="https://doi.org/10.1002/ppap.202200052">https://doi.org/10.1002/ppap.202200052</a> X. Xie, T. de los Arcos, and G. Grundmeier, “Comparative analysis of hexamethyldisiloxane and hexamethyldisilazane plasma polymer thin films before and after plasma oxidation,” <i>Plasma Processes and Polymers</i>, vol. 19, no. 11, Art. no. 2200052, 2022, doi: <a href="https://doi.org/10.1002/ppap.202200052">10.1002/ppap.202200052</a>. Xie, Xiaofan, Teresa de los Arcos, and Guido Grundmeier. “Comparative Analysis of Hexamethyldisiloxane and Hexamethyldisilazane Plasma Polymer Thin Films before and after Plasma Oxidation.” <i>Plasma Processes and Polymers</i> 19, no. 11 (2022). <a href="https://doi.org/10.1002/ppap.202200052">https://doi.org/10.1002/ppap.202200052</a>. Xie X, de los Arcos T, Grundmeier G. Comparative analysis of hexamethyldisiloxane and hexamethyldisilazane plasma polymer thin films before and after plasma oxidation. <i>Plasma Processes and Polymers</i>. 2022;19(11). doi:<a href="https://doi.org/10.1002/ppap.202200052">10.1002/ppap.202200052</a> 346502022-12-21T09:33:54Z2022-12-21T09:34:05Z