---
_id: '34650'
article_number: '2200052'
author:
- first_name: Xiaofan
  full_name: Xie, Xiaofan
  last_name: Xie
- first_name: Teresa
  full_name: de los Arcos, Teresa
  last_name: de los Arcos
- first_name: Guido
  full_name: Grundmeier, Guido
  id: '194'
  last_name: Grundmeier
citation:
  ama: Xie X, de los Arcos T, Grundmeier G. Comparative analysis of hexamethyldisiloxane
    and hexamethyldisilazane plasma polymer thin films before and after plasma oxidation.
    <i>Plasma Processes and Polymers</i>. 2022;19(11). doi:<a href="https://doi.org/10.1002/ppap.202200052">10.1002/ppap.202200052</a>
  apa: Xie, X., de los Arcos, T., &#38; Grundmeier, G. (2022). Comparative analysis
    of hexamethyldisiloxane and hexamethyldisilazane plasma polymer thin films before
    and after plasma oxidation. <i>Plasma Processes and Polymers</i>, <i>19</i>(11),
    Article 2200052. <a href="https://doi.org/10.1002/ppap.202200052">https://doi.org/10.1002/ppap.202200052</a>
  bibtex: '@article{Xie_de los Arcos_Grundmeier_2022, title={Comparative analysis
    of hexamethyldisiloxane and hexamethyldisilazane plasma polymer thin films before
    and after plasma oxidation}, volume={19}, DOI={<a href="https://doi.org/10.1002/ppap.202200052">10.1002/ppap.202200052</a>},
    number={112200052}, journal={Plasma Processes and Polymers}, publisher={Wiley},
    author={Xie, Xiaofan and de los Arcos, Teresa and Grundmeier, Guido}, year={2022}
    }'
  chicago: Xie, Xiaofan, Teresa de los Arcos, and Guido Grundmeier. “Comparative Analysis
    of Hexamethyldisiloxane and Hexamethyldisilazane Plasma Polymer Thin Films before
    and after Plasma Oxidation.” <i>Plasma Processes and Polymers</i> 19, no. 11 (2022).
    <a href="https://doi.org/10.1002/ppap.202200052">https://doi.org/10.1002/ppap.202200052</a>.
  ieee: 'X. Xie, T. de los Arcos, and G. Grundmeier, “Comparative analysis of hexamethyldisiloxane
    and hexamethyldisilazane plasma polymer thin films before and after plasma oxidation,”
    <i>Plasma Processes and Polymers</i>, vol. 19, no. 11, Art. no. 2200052, 2022,
    doi: <a href="https://doi.org/10.1002/ppap.202200052">10.1002/ppap.202200052</a>.'
  mla: Xie, Xiaofan, et al. “Comparative Analysis of Hexamethyldisiloxane and Hexamethyldisilazane
    Plasma Polymer Thin Films before and after Plasma Oxidation.” <i>Plasma Processes
    and Polymers</i>, vol. 19, no. 11, 2200052, Wiley, 2022, doi:<a href="https://doi.org/10.1002/ppap.202200052">10.1002/ppap.202200052</a>.
  short: X. Xie, T. de los Arcos, G. Grundmeier, Plasma Processes and Polymers 19
    (2022).
date_created: 2022-12-21T09:33:54Z
date_updated: 2022-12-21T09:34:05Z
department:
- _id: '302'
doi: 10.1002/ppap.202200052
intvolume: '        19'
issue: '11'
keyword:
- Polymers and Plastics
- Condensed Matter Physics
language:
- iso: eng
publication: Plasma Processes and Polymers
publication_identifier:
  issn:
  - 1612-8850
  - 1612-8869
publication_status: published
publisher: Wiley
status: public
title: Comparative analysis of hexamethyldisiloxane and hexamethyldisilazane plasma
  polymer thin films before and after plasma oxidation
type: journal_article
user_id: '48864'
volume: 19
year: '2022'
...