@inproceedings{3543, author = {{Hildebrandt, Andre and Alhaddad, Samer and Hammer, Manfred and Förstner, Jens}}, booktitle = {{Integrated Optics: Devices, Materials, and Technologies XX}}, editor = {{Broquin, Jean-Emmanuel and Nunzi Conti, Gualtiero}}, keywords = {{tet_topic_waveguide}}, publisher = {{SPIE}}, title = {{{Oblique incidence of semi-guided waves on step-like folds in planar dielectric slabs: Lossless vertical interconnects in 3D integrated photonic circuits}}}, doi = {{10.1117/12.2214460}}, year = {{2016}}, }