{"publication":"Plasma Processes and Polymers","doi":"10.1002/ppap.202200052","year":"2022","article_number":"2200052","volume":19,"title":"Comparative analysis of hexamethyldisiloxane and hexamethyldisilazane plasma polymer thin films before and after plasma oxidation","publication_status":"published","department":[{"_id":"302"}],"citation":{"mla":"Xie, Xiaofan, et al. “Comparative Analysis of Hexamethyldisiloxane and Hexamethyldisilazane Plasma Polymer Thin Films before and after Plasma Oxidation.” Plasma Processes and Polymers, vol. 19, no. 11, 2200052, Wiley, 2022, doi:10.1002/ppap.202200052.","ieee":"X. Xie, M. T. de los Arcos de Pedro, and G. Grundmeier, “Comparative analysis of hexamethyldisiloxane and hexamethyldisilazane plasma polymer thin films before and after plasma oxidation,” Plasma Processes and Polymers, vol. 19, no. 11, Art. no. 2200052, 2022, doi: 10.1002/ppap.202200052.","ama":"Xie X, de los Arcos de Pedro MT, Grundmeier G. Comparative analysis of hexamethyldisiloxane and hexamethyldisilazane plasma polymer thin films before and after plasma oxidation. Plasma Processes and Polymers. 2022;19(11). doi:10.1002/ppap.202200052","apa":"Xie, X., de los Arcos de Pedro, M. T., & Grundmeier, G. (2022). Comparative analysis of hexamethyldisiloxane and hexamethyldisilazane plasma polymer thin films before and after plasma oxidation. Plasma Processes and Polymers, 19(11), Article 2200052. https://doi.org/10.1002/ppap.202200052","chicago":"Xie, Xiaofan, Maria Teresa de los Arcos de Pedro, and Guido Grundmeier. “Comparative Analysis of Hexamethyldisiloxane and Hexamethyldisilazane Plasma Polymer Thin Films before and after Plasma Oxidation.” Plasma Processes and Polymers 19, no. 11 (2022). https://doi.org/10.1002/ppap.202200052.","short":"X. Xie, M.T. de los Arcos de Pedro, G. Grundmeier, Plasma Processes and Polymers 19 (2022).","bibtex":"@article{Xie_de los Arcos de Pedro_Grundmeier_2022, title={Comparative analysis of hexamethyldisiloxane and hexamethyldisilazane plasma polymer thin films before and after plasma oxidation}, volume={19}, DOI={10.1002/ppap.202200052}, number={112200052}, journal={Plasma Processes and Polymers}, publisher={Wiley}, author={Xie, Xiaofan and de los Arcos de Pedro, Maria Teresa and Grundmeier, Guido}, year={2022} }"},"user_id":"54556","language":[{"iso":"eng"}],"_id":"35974","date_updated":"2023-01-24T08:48:44Z","issue":"11","type":"journal_article","date_created":"2023-01-11T10:08:25Z","status":"public","intvolume":" 19","author":[{"full_name":"Xie, Xiaofan","last_name":"Xie","first_name":"Xiaofan"},{"first_name":"Maria Teresa","last_name":"de los Arcos de Pedro","full_name":"de los Arcos de Pedro, Maria Teresa","id":"54556"},{"last_name":"Grundmeier","first_name":"Guido","id":"194","full_name":"Grundmeier, Guido"}],"publisher":"Wiley","publication_identifier":{"issn":["1612-8850","1612-8869"]},"keyword":["Polymers and Plastics","Condensed Matter Physics"]}