{"volume":19,"article_number":"2200052","publisher":"Wiley","publication_status":"published","doi":"10.1002/ppap.202200052","_id":"35974","issue":"11","publication_identifier":{"issn":["1612-8850","1612-8869"]},"year":"2022","date_updated":"2023-01-24T08:48:44Z","department":[{"_id":"302"}],"intvolume":"        19","status":"public","keyword":["Polymers and Plastics","Condensed Matter Physics"],"date_created":"2023-01-11T10:08:25Z","citation":{"chicago":"Xie, Xiaofan, Maria Teresa de los Arcos de Pedro, and Guido Grundmeier. “Comparative Analysis of Hexamethyldisiloxane and Hexamethyldisilazane Plasma Polymer Thin Films before and after Plasma Oxidation.” <i>Plasma Processes and Polymers</i> 19, no. 11 (2022). <a href=\"https://doi.org/10.1002/ppap.202200052\">https://doi.org/10.1002/ppap.202200052</a>.","ieee":"X. Xie, M. T. de los Arcos de Pedro, and G. Grundmeier, “Comparative analysis of hexamethyldisiloxane and hexamethyldisilazane plasma polymer thin films before and after plasma oxidation,” <i>Plasma Processes and Polymers</i>, vol. 19, no. 11, Art. no. 2200052, 2022, doi: <a href=\"https://doi.org/10.1002/ppap.202200052\">10.1002/ppap.202200052</a>.","mla":"Xie, Xiaofan, et al. “Comparative Analysis of Hexamethyldisiloxane and Hexamethyldisilazane Plasma Polymer Thin Films before and after Plasma Oxidation.” <i>Plasma Processes and Polymers</i>, vol. 19, no. 11, 2200052, Wiley, 2022, doi:<a href=\"https://doi.org/10.1002/ppap.202200052\">10.1002/ppap.202200052</a>.","short":"X. Xie, M.T. de los Arcos de Pedro, G. Grundmeier, Plasma Processes and Polymers 19 (2022).","bibtex":"@article{Xie_de los Arcos de Pedro_Grundmeier_2022, title={Comparative analysis of hexamethyldisiloxane and hexamethyldisilazane plasma polymer thin films before and after plasma oxidation}, volume={19}, DOI={<a href=\"https://doi.org/10.1002/ppap.202200052\">10.1002/ppap.202200052</a>}, number={112200052}, journal={Plasma Processes and Polymers}, publisher={Wiley}, author={Xie, Xiaofan and de los Arcos de Pedro, Maria Teresa and Grundmeier, Guido}, year={2022} }","ama":"Xie X, de los Arcos de Pedro MT, Grundmeier G. Comparative analysis of hexamethyldisiloxane and hexamethyldisilazane plasma polymer thin films before and after plasma oxidation. <i>Plasma Processes and Polymers</i>. 2022;19(11). doi:<a href=\"https://doi.org/10.1002/ppap.202200052\">10.1002/ppap.202200052</a>","apa":"Xie, X., de los Arcos de Pedro, M. T., &#38; Grundmeier, G. (2022). Comparative analysis of hexamethyldisiloxane and hexamethyldisilazane plasma polymer thin films before and after plasma oxidation. <i>Plasma Processes and Polymers</i>, <i>19</i>(11), Article 2200052. <a href=\"https://doi.org/10.1002/ppap.202200052\">https://doi.org/10.1002/ppap.202200052</a>"},"publication":"Plasma Processes and Polymers","user_id":"54556","author":[{"last_name":"Xie","first_name":"Xiaofan","full_name":"Xie, Xiaofan"},{"id":"54556","last_name":"de los Arcos de Pedro","first_name":"Maria Teresa","full_name":"de los Arcos de Pedro, Maria Teresa"},{"first_name":"Guido","full_name":"Grundmeier, Guido","id":"194","last_name":"Grundmeier"}],"type":"journal_article","language":[{"iso":"eng"}],"title":"Comparative analysis of hexamethyldisiloxane and hexamethyldisilazane plasma polymer thin films before and after plasma oxidation"}