{"date_created":"2023-01-11T10:10:09Z","status":"public","doi":"10.1002/ppap.202100174","intvolume":"        19","_id":"35977","year":"2022","publication":"Plasma Processes and Polymers","department":[{"_id":"302"}],"publication_status":"published","publication_identifier":{"issn":["1612-8850","1612-8869"]},"user_id":"54556","publisher":"Wiley","language":[{"iso":"eng"}],"article_number":"2100174","keyword":["Polymers and Plastics","Condensed Matter Physics"],"date_updated":"2023-01-24T08:07:46Z","type":"journal_article","title":"Influence of surface activation on the microporosity of PE‐CVD and PE‐ALD SiO            <sub>              <i>x</i>            </sub>            thin films on PDMS","author":[{"last_name":"Hoppe","first_name":"Christian","full_name":"Hoppe, Christian"},{"last_name":"Mitschker","first_name":"Felix","full_name":"Mitschker, Felix"},{"last_name":"Mai","first_name":"Lukas","full_name":"Mai, Lukas"},{"full_name":"Liedke, Maciej Oskar","last_name":"Liedke","first_name":"Maciej Oskar"},{"full_name":"de los Arcos de Pedro, Maria Teresa","first_name":"Maria Teresa","last_name":"de los Arcos de Pedro","id":"54556"},{"full_name":"Awakowicz, Peter","last_name":"Awakowicz","first_name":"Peter"},{"full_name":"Devi, Anjana","first_name":"Anjana","last_name":"Devi"},{"last_name":"Attallah","first_name":"Ahmed Gamal","full_name":"Attallah, Ahmed Gamal"},{"full_name":"Butterling, Maik","first_name":"Maik","last_name":"Butterling"},{"last_name":"Wagner","first_name":"Andreas","full_name":"Wagner, Andreas"},{"full_name":"Grundmeier, Guido","first_name":"Guido","last_name":"Grundmeier"}],"citation":{"bibtex":"@article{Hoppe_Mitschker_Mai_Liedke_de los Arcos de Pedro_Awakowicz_Devi_Attallah_Butterling_Wagner_et al._2022, title={Influence of surface activation on the microporosity of PE‐CVD and PE‐ALD SiO            <sub>              <i>x</i>            </sub>            thin films on PDMS}, volume={19}, DOI={<a href=\"https://doi.org/10.1002/ppap.202100174\">10.1002/ppap.202100174</a>}, number={42100174}, journal={Plasma Processes and Polymers}, publisher={Wiley}, author={Hoppe, Christian and Mitschker, Felix and Mai, Lukas and Liedke, Maciej Oskar and de los Arcos de Pedro, Maria Teresa and Awakowicz, Peter and Devi, Anjana and Attallah, Ahmed Gamal and Butterling, Maik and Wagner, Andreas and et al.}, year={2022} }","chicago":"Hoppe, Christian, Felix Mitschker, Lukas Mai, Maciej Oskar Liedke, Maria Teresa de los Arcos de Pedro, Peter Awakowicz, Anjana Devi, et al. “Influence of Surface Activation on the Microporosity of PE‐CVD and PE‐ALD SiO            <sub>              <i>x</i>            </sub>            Thin Films on PDMS.” <i>Plasma Processes and Polymers</i> 19, no. 4 (2022). <a href=\"https://doi.org/10.1002/ppap.202100174\">https://doi.org/10.1002/ppap.202100174</a>.","short":"C. Hoppe, F. Mitschker, L. Mai, M.O. Liedke, M.T. de los Arcos de Pedro, P. Awakowicz, A. Devi, A.G. Attallah, M. Butterling, A. Wagner, G. Grundmeier, Plasma Processes and Polymers 19 (2022).","apa":"Hoppe, C., Mitschker, F., Mai, L., Liedke, M. O., de los Arcos de Pedro, M. T., Awakowicz, P., Devi, A., Attallah, A. G., Butterling, M., Wagner, A., &#38; Grundmeier, G. (2022). Influence of surface activation on the microporosity of PE‐CVD and PE‐ALD SiO            <sub>              <i>x</i>            </sub>            thin films on PDMS. <i>Plasma Processes and Polymers</i>, <i>19</i>(4), Article 2100174. <a href=\"https://doi.org/10.1002/ppap.202100174\">https://doi.org/10.1002/ppap.202100174</a>","ama":"Hoppe C, Mitschker F, Mai L, et al. Influence of surface activation on the microporosity of PE‐CVD and PE‐ALD SiO            <sub>              <i>x</i>            </sub>            thin films on PDMS. <i>Plasma Processes and Polymers</i>. 2022;19(4). doi:<a href=\"https://doi.org/10.1002/ppap.202100174\">10.1002/ppap.202100174</a>","ieee":"C. Hoppe <i>et al.</i>, “Influence of surface activation on the microporosity of PE‐CVD and PE‐ALD SiO            <sub>              <i>x</i>            </sub>            thin films on PDMS,” <i>Plasma Processes and Polymers</i>, vol. 19, no. 4, Art. no. 2100174, 2022, doi: <a href=\"https://doi.org/10.1002/ppap.202100174\">10.1002/ppap.202100174</a>.","mla":"Hoppe, Christian, et al. “Influence of Surface Activation on the Microporosity of PE‐CVD and PE‐ALD SiO            <sub>              <i>x</i>            </sub>            Thin Films on PDMS.” <i>Plasma Processes and Polymers</i>, vol. 19, no. 4, 2100174, Wiley, 2022, doi:<a href=\"https://doi.org/10.1002/ppap.202100174\">10.1002/ppap.202100174</a>."},"volume":19,"issue":"4"}